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Yoshikazu Miyajima

Canon Inc.

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Publication

Featured researches published by Yoshikazu Miyajima.

Archive | 2004

Substrate holding technique

Yoshikazu Miyajima

Archive | 2001

Stage device, an exposure apparatus and a device manufacturing method using the same

Yoshikazu Miyajima; Tsuneo Takashima; Yukio Takabayashi

Archive | 1999

Stage system for exposure apparatus

Yoshikazu Miyajima; Yukio Tokuda

Archive | 2006

Positioning apparatus, exposure apparatus, and device manufacturing method

Hideo Tanaka; Yoshikazu Miyajima; Yasuhito Sasaki

Archive | 2003

Reflection mirror apparatus, exposure apparatus and device manufacturing method

Yoshikazu Miyajima

Archive | 2004

Exposure apparatus and device fabrication method

Yoshikazu Miyajima

Archive | 1995

Magneto-optical recording/reproducing method with optical head servo inhibited during magnetic head loading

Yoshikazu Miyajima

Archive | 1994

Magnetooptical information recording/reproducing method and apparatus employing a floating slider supporting a magnetic head

Hiroaki Kakimoto; Nobuaki Date; Yoshikazu Miyajima; Masahiko Chaya

Archive | 1989

Recording head for magneto-optical information recording apparatus

Yoshikazu Miyajima; Makoto Shiho

Archive | 2005

Stage apparatus, exposure apparatus, and device manufacturing method

Yasuhito Sasaki; Yoshikazu Miyajima; Naosuke Nishimura; Hideo Tanaka; Toshihiko Nishida

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Yasuhito Sasaki

Canon Inc.

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Hideo Tanaka

Canon Inc.

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Hitoshi Sato

Canon Inc.

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Makoto Shiho

Canon Inc.

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Yukio Takabayashi

Canon Inc.

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Akio Saito

Canon Inc.

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Hiroaki Kakimoto

Canon Inc.

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Hitoshi Nakano

Canon Inc.

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Masahiko Chaya

Canon Inc.

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Nobuaki Date

Canon Inc.

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