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Yoshinobu Kawata

Mitsubishi

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Publication

Featured researches published by Yoshinobu Kawata.

Archive | 1992

Chemical vapor deposition method, and chemical vapor deposition treatment system and chemical vapor deposition apparatus therefor

Yoshinobu Kawata; Toshihiko Minami

Archive | 1988

Chemical coating apparatus

Yoshinobu Kawata; Katsunori Fuchigami

Archive | 1994

Apparatus for manufacturing semiconductor and method of manufacturing semiconductor

Yoshinobu Kawata; Toshinobu Banjo

Archive | 1993

Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber

Koichiro Tsutahara; Toru Yamaguchi; Taizo Ejima; Toshihiko Minami; Yoshinobu Kawata

Archive | 1993

Reaktionskammer für eine Vorrichtung zur chemischen Gasphasenabscheidung

Koichiro Tsutahara; Toru Yamaguchi; Taizo Ejima; Toshihiko Minami; Yoshinobu Kawata

Archive | 1993

Reaction chamber for chemical vapour deposition - comprises wafer heating appts., gas supply head, reaction chamber element, waste gas outlet

Koichiro Tsutahara; Toru Yamaguchi; Taizo Ejima; Toshihiko Minami; Yoshinobu Kawata

Archive | 1994

Device for semiconductor production and method for semiconductor production

Yoshinobu Kawata; Toshinobu Banjo

Archive | 1992

CVD to deliver reaction gas to form film of given compsn. - in which reaction zone is insulated from ambient air and reaction zone is linked to outlet channel

Yoshinobu Kawata; Toshihiko Minami

Archive | 1994

Einrichtung zur Halbleiterherstellung und Verfahren zur Halbleiterherstellung

Yoshinobu Kawata; Toshinobu Banjo

Archive | 1994

Einrichtung und Verfahren zum Herstellen eines Halbleiters Apparatus and method for manufacturing a semiconductor

Toshinobu Banjo; Yoshinobu Kawata

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Toshihiko Minami

Mitsubishi

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Koichiro Tsutahara

Mitsubishi Electric

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Taizo Ejima

Mitsubishi

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Toru Yamaguchi

Mitsubishi

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Toshinobu Banjo

Mitsubishi

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Katsunori Fuchigami

Mitsubishi

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