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Toshihiko Minami

Mitsubishi

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Publication

Featured researches published by Toshihiko Minami.

Archive | 1992

Chemical vapor deposition method, and chemical vapor deposition treatment system and chemical vapor deposition apparatus therefor

Yoshinobu Kawata; Toshihiko Minami

Archive | 2003

Semiconductor manufacturing system with exhaust pipe, deposit elimination method for use with semiconductor manufacturing system, and method of manufacturing semiconductor device

Toshihiko Minami

Archive | 1987

Apparatus for uniformly distributing plasma over a substrate

Koichiro Nakanishi; Hiroki Ootera; Minoru Hanazaki; Toshihiko Minami

Archive | 1989

Method of manufacturing a semiconductor device with a planar interlayer insulating film

Atsuhiro Fujii; Toshihiko Minami; Hideki Genjo

Archive | 1993

Reaction chamber for a chemical vapor deposition apparatus and a chemical vapor deposition apparatus using such a reaction chamber

Koichiro Tsutahara; Toru Yamaguchi; Taizo Ejima; Toshihiko Minami; Yoshinobu Kawata

Archive | 1993

Reaktionskammer für eine Vorrichtung zur chemischen Gasphasenabscheidung

Koichiro Tsutahara; Toru Yamaguchi; Taizo Ejima; Toshihiko Minami; Yoshinobu Kawata

Archive | 1993

Reaction chamber for chemical vapour deposition - comprises wafer heating appts., gas supply head, reaction chamber element, waste gas outlet

Koichiro Tsutahara; Toru Yamaguchi; Taizo Ejima; Toshihiko Minami; Yoshinobu Kawata

Archive | 2001

Semiconductor manufacturing device, deposit removing method therein and manufacturing method for semiconductor device

Toshihiko Minami; 利彦 南

Archive | 1992

CVD to deliver reaction gas to form film of given compsn. - in which reaction zone is insulated from ambient air and reaction zone is linked to outlet channel

Yoshinobu Kawata; Toshihiko Minami

Archive | 1992

Reaction chamber for chemical, vapor growth apparatus and chemical vapor growth apparatus using the same

Taizo Ejima; Yoshinobu Kawada; Toshihiko Minami; Kouichirou Tsutahara; Toru Yamaguchi; 利彦 南; 徹 山口; 泰蔵 江島; 良信 河田; 晃一郎 蔦原

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Yoshinobu Kawata

Mitsubishi

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Taizo Ejima

Mitsubishi

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Toru Yamaguchi

Mitsubishi

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Koichiro Tsutahara

Mitsubishi Electric

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Hiroki Ootera

Mitsubishi Electric

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Koichiro Nakanishi

Mitsubishi

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Minoru Hanazaki

Mitsubishi Electric

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Atsuhiro Fujii

Mitsubishi

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Hideki Genjo

Mitsubishi

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Kouichirou Tsutahara

Mitsubishi

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