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Yoshitsugu Tsutsumi

Hitachi

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Publication

Featured researches published by Yoshitsugu Tsutsumi.

Archive | 1995

Method and device for manufacturing semiconductor, semiconductor wafer and semiconductor element

Osamu Kasahara; Yoshio Okamoto; Yoshitsugu Tsutsumi; Kazunori Watanabe; 芳紹 堤; 良雄 岡本; 一典 渡辺; 修 笠原

Archive | 1988

Apparatus for analysis employing electron

Yoshitsugu Tsutsumi; Shinjiro Ueda; Tadashi Otaka

Archive | 1994

Vapor phase chemical reaction equipment

Yoshitsugu Tsutsumi; Kazunori Watanabe; 芳紹 堤; 一典 渡辺

Archive | 2000

Method of and apparatus for manufacturing semiconductors

Yoshitsugu Tsutsumi; Yoshio Okamoto; Hideki Tomioka; Akira Ohkawa; Toshio Ando

Shinku | 1995

Development of Analysing System for Chemical Vapor Deposition Reaction Mechanism Using Molecular Beam Sampling Method (2)

Yoshitsugu Tsutsumi; Masato Ikegawa; Tatehito Usui; Junichi Kobayashi; Kazunori Watanabe

Archive | 1994

VAPOR-PHASE CHEMICAL REACTOR

Masahiro Fujita; Masato Ikegawa; Kazuhiko Matsuoka; Takeshi Ogura; Yoshitsugu Tsutsumi; Tomoji Watanabe; Akira Yoshida; 明 吉田; 芳紹 堤; 武 小倉; 一彦 松岡; 正人 池川; 智司 渡辺; 昌洋 藤田

Shinku | 2000

Study for Practical Use of the New Vaporizer Using Direct Injection.

Yoshitsugu Tsutsumi; Hideki Tomioka; Yoshio Okamoto

Shinku | 1999

Basic Performance of the New Vaporizer Using. Direct Injection for Liquid Sources to Deposite Thin Film

Yoshitsugu Tsutsumi; Hideki Tomioka; Yoshio Okamoto

Shinku | 1997

Molecular Beam Sampling to Analyze the Reaction Mechanism of Chemical Vapor Deposition

Yoshitsugu Tsutsumi; Masato Ikegawa; Tatehiko Usui; Yoko Ichikawa; Kazunori Watanabe; Junichi Kobayashi

Shinku | 1994

Prevention of Oil Vapor Backsteaming in Vacuum System by Gas Purge Method

Yoshitsugu Tsutsumi; Shinjiro Ueda; Masato Ikegawa; Junichi Kobayashi

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Collaboration

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Masato Ikegawa

Hitachi

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Kazunori Watanabe

Hitachi

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Junichi Kobayashi

Hitachi

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Hideki Tomioka

Hitachi

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Shinjiro Ueda

Hitachi

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Yoshio Okamoto

Hitachi

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Tadashi Otaka

Hitachi

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Tatehito Usui

Hitachi

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Akira Ohkawa

Hitachi

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Jun'ichi Kobayasi

Hitachi

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