Yu-Seong Jeon
Samsung
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Publication
Featured researches published by Yu-Seong Jeon.
photonics global conference | 2012
Yang-Wook Kim; Jeonghun Kim; Yu-Seong Jeon
The Excimer(combination word of excited state of dimer) UV is the most utilized pre-cleaning process in TFT manufacturing system. It removes many organic impurities on the surface of the TFT Glass as using the Ultra-Violet. Through the Excimer UV lamp, if the UV of 172nm wave is exposed by 172nm, the impurities change into the hydrophile properties. On the contrary, the Excimer UV occur the different micro by-products, called the Si particles. Those make the defective products like GD-Short, DATA-Open and etc. For the improvement of the weakness point, we studied the effectiveness of the periodical precision cleaning which is the most existed in the N2 Diffuser of Excimer UV.
Archive | 2004
Jae-Kwon Kim; Yong-jun Hyundai Home Town Kim; Hyo-Dae Kim; Yu-Seong Jeon; Jong-Wook Park; Eu-gene Misung Apt Choi; Sung-Hee Kim; Young-Mi Kang
Archive | 2004
Yong-Jun Kim; Jaekwon Kim; Hyo-Dae Kim; Yu-Seong Jeon; Jong-Wook Park; Eu-Gene Choi; Sung-Hee Kim; Young-Mi Kang
Archive | 2005
Heechul Yun; Yu-Seong Jeon; Myoung-soon Choi
Archive | 2004
Hyo-Dae Kim; Yong-jun Hyundai Home Town Kim; Jong-Wook Park; Yu-Seong Jeon; young-mi Hyundai cha park Kang; Sung-Hee Kim; Jaekwon Kim; Eu-Gene Choi
Archive | 2007
Yu-Seong Jeon; Cory Kim; Won-Joo Park; Du-Il Kim
Archive | 2006
Sang-shin Park; Deok-ho Kim; Kang-Myeong Cho; Du-Il Kim; Ki-Seok Chang; Yu-Seong Jeon; Hae-sik Jun; Sun-il Choi
Archive | 2005
Myoung-soon Choi; Yu-Seong Jeon; Heechul Yun
Archive | 2005
Yu-Seong Jeon; Du-Il Kim
Archive | 2004
Jaekwon Kim; Yong-Jun Kim; Hyo-Dae Kim; Yu-Seong Jeon; Young-Mi Kang; Sung-Hee Kim; Jong-Wook Park; Eu-Gene Choi
