Yuen Kuan Yong

Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning

The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated XY nanopositioning stage are presented in this paper. The main goal of the design is to combine the ability to scan over a relatively large range (25times25 mum) with high scanning speed. Consequently, the stage is designed to have its first dominant mode at 2.7 kHz. Cross-coupling between the two axes is kept to -35 dB, low enough to utilize single-input--single-output control strategies for tracking. Finite-element analysis (FEA) is used during the design process to analyze the mechanical resonance frequencies, travel range, and cross-coupling between the X- and Y-axes of the stage. Nonlinearities such as hysteresis are present in such stages. These effects, which exist due to the use of piezoelectric stacks for actuation, are minimized using charge actuation. The integral resonant control method is applied in conjunction with feedforward inversion technique to achieve high-speed and accurate scanning performances, up to 400 Hz.

Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Recent interest in high-speed scanning probe microscopy for high-throughput applications including video-rate atomic force microscopy and probe-based nanofabrication has sparked attention on the development of high-bandwidth flexure-guided nanopositioning systems (nanopositioners). Such nanopositioners are designed to move samples with sub-nanometer resolution with positioning bandwidth in the kilohertz range. State-of-the-art designs incorporate uniquely designed flexure mechanisms driven by compact and stiff piezoelectric actuators. This paper surveys key advances in mechanical design and control of dynamic effects and nonlinearities, in the context of high-speed nanopositioning. Future challenges and research topics are also discussed.

Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and Accurate Raster Scanning

A compliant XY nanopositioner is presented in this brief. The device is designed to have a very low cross-coupling between the X- and Y-axis. Despite this, during high-speed raster scans, the cross-coupling effect can not be ignored. In this brief, a H∞ controller is designed and implemented to minimize the X-to- <;i>Y<;/i> cross-coupling of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking, as well as sufficient damping. Raster scan results over an area of 10 μm × 10 μm with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100 Hz, with nanoscale resolution are also illustrated.

High-speed cycloid-scan atomic force microscopy

A key hurdle in achieving high scan speeds in atomic force microscopes is that the probe is required to be scanned over the sample in a zig-zag raster pattern. The fast axis of the AFM scanner must track a signal that contains frequencies beyond its mechanical bandwidth. Consequently, fast raster scans generate distortions in the resulting image. We propose a smooth cycloid-like scan pattern that allows us to achieve scan speeds much higher than a raster scan. We illustrate how the proposed method can be implemented on a commercial AFM with minimal modifications.

Design, Modeling, and FPAA-Based Control of a High-Speed Atomic Force Microscope Nanopositioner

An XYZ nanopositioner is designed for fast the atomic force microscopy. The first resonant modes of the device are measured at 8.8, 8.9, and 48.4 kHz along the X-, Y-, and Z-axes, respectively, which are in close agreement to the finite-element simulations. The measured travel ranges of the lateral and vertical axes are 6.5 μm × 6.6 μm and 4.2 μm, respectively. Actuating the nanopositioner at frequencies beyond 1% of the first resonance of the lateral axes causes mechanical vibrations that result in degradation of the images generated. In order to improve the lateral scanning bandwidth, controllers are designed using the integral resonant control methodology to damp the resonant modes of the nanopositioner and to enable fast actuation. Due to the large bandwidth of the designed nanopositioner, a field programmable analog array is used for analog implementation of the controllers. High-resolution images are successfully generated at 200-Hz line rate with 200×200 pixel resolution in closed loop.

A three‐DOF compliant micromotion stage with flexure hinges

Micromanipulation has enabled numerous technological breakthroughs in recent years, from advances in biotechnology to microcomponent assembly. Micromotion devices commonly use piezoelectric actuators (PZT) together with compliant mechanisms to provide fine motions with position resolution in the nanometre or even sub‐nanometre range. Many multiple degree of freedom (DOF) micromotion stages have parallel structures due to better stiffness and accuracy than serial structures. This paper presents the development of a three‐DOF compliant micromotion stage with flexure hinges and parallel structure for applications requiring motions in micrometres. The derivation of a simple linear kinematic model of the compliant mechanism is presented and simulation results before and after calibration are compared with results from finite element (FE) modeling and experiments. The position control system, which uses an experimentally determined constant‐Jacobian, and its performance are also presented and discussed.

A Novel Piezoelectric Strain Sensor for Simultaneous Damping and Tracking Control of a High-Speed Nanopositioner

This paper presents a novel piezoelectric strain sensor for damping and accurate tracking control of a high-speed nanopositioning stage. Piezoelectric sensors have the benefit of simple interface circuitry, low cost, high sensitivity, and high bandwidth. Although piezoelectric sensors have been successfully used as vibration sensors in smart structures, complications arise when they are used in a feedback loop for tracking. As piezoelectric strain sensors exhibit a capacitive source impedance, a high-pass filter is created, typically with a cut-off frequency of 1 to 10 Hz. This filter can cause significant errors and destabilize a tracking control system. Here, we overcome this problem by using a low-frequency bypass technique to replace the low-frequency component of the strain measurement with an estimate based on the open-loop system. Once the low-frequency filter is accounted for, any standard control system can be applied. In this paper, an analog integral resonant controller together with an integral tracking controller are implemented on a flexure-guided nanopositioner. The resulting closed-loop bandwidth is experimentally demonstrated to be 1.86 kHz. The nanopositioner is installed in an Atomic Force Microscope to obtain open- and closed-loop images at line rates of 40 and 78 Hz. Images recorded in closed loop show a significant improvement due to the elimination of nonlinearity.

High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues

Tracking of triangular or sawtooth waveforms is a major difficulty for achieving high-speed operation in many scanning applications such as scanning probe microscopy. Such non-smooth waveforms contain high order harmonics of the scan frequency that can excite mechanical resonant modes of the positioning system, limiting the scan range and bandwidth. Hence, fast raster scanning often leads to image distortion. This paper proposes analysis and design methodologies for a nonlinear and smooth closed curve, known as Lissajous pattern, which allows much faster operations compared to the ordinary scan patterns. A simple closed-form measure is formulated for the image resolution of the Lissajous pattern. This enables us to systematically determine the scan parameters. Using internal model controllers (IMC), this non-raster scan method is implemented on a commercial atomic force microscope driven by a low resonance frequency positioning stage. To reduce the tracking errors due to actuator nonlinearities, higher order harmonic oscillators are included in the IMC controllers. This results in significant improvement compared to the traditional IMC method. It is shown that the proposed IMC controller achieves much better tracking performances compared to integral controllers when the noise rejection performances is a concern.

Tracking of Triangular References Using Signal Transformation for Control of a Novel AFM Scanner Stage

In this paper, we design feedback controllers for lateral and transversal axes of an atomic force microscope (AFM) piezoelectric tube scanner. The controllers are constrained to keep the standard deviation of the measurement noise fed back to the displacement output around 0.13 nm. It is shown that the incorporation of appropriate inner loops provides disturbance rejection capabilities and robustness against dc gain uncertainties, two requirements for satisfactory operation of signal transformation method. Simulations and experiments show significant improvement of steady-state tracking error with signal transformation, while limiting the projected measurement noise.

Atomic force microscopy with a 12-electrode piezoelectric tube scanner

This paper presents a piezoelectric tube scanner with a novel electrode pattern and describes how it may be used for simultaneous sensing and actuation. The electrodes are arranged such that the tube is driven in an antisymmetrical manner, resulting in a collocated system suitable for positive position feedback (PPF). A PPF controller is designed to damp the scanners resonance. Piezoelectric strain-induced voltage is used as measurement. The device is then installed into an atomic force microscope to obtain open- and closed-loop images of a grating at 10, 15.6, and 31 Hz scan rates. The closed-loop images are noticeably superior to the open-loop images, illustrating the effectiveness of the proposed scanner when used simultaneously as a sensor and an actuator.