Is this you? Create Your Porfile
Avatar

Yuichi Douki

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Yuichi Douki is active.

Explore More

Publication

Featured researches published by Yuichi Douki.

Archive | 2004

Substrate processing apparatus and method for adjusting a substrate transfer position

Kazuhiko Ito; Kazutoshi Ishimaru; Jun Ookura; Michio Kinoshita; Yuichi Douki

Archive | 2010

Substrate transfer apparatus and substrate treatment system

Mitsuteru Yano; Yuichi Douki; Hiroshi Tomita

Archive | 2007

Substrate transfer apparatus, substrate process system, and substrate transfer method

Akira Murata; Suguru Enokida; Yuichi Douki

Archive | 2012

Substrate holder positioning method and substrate processing system

Yuichi Douki; Tokutarou Hayashi; Naruaki Iida; Suguru Enokida

Archive | 2013

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON-TRANSITORY STORAGE MEDIUM

Tokutarou Hayashi; Yuichi Douki; Hirotoshi Mori; Akihiro Teramoto

Archive | 2011

Coating and developing apparatus, coating and developing method and non-transitory tangible medium

Shinichi Hayashi; Yuichi Douki; Akira Miyata; Yuuichi Yamamoto; Kousuke Yoshihara; Nobuaki Matsuoka; Suguru Enokida

Archive | 2008

Jig for detecting position

Toshiyuki Matsumoto; Tomohide Minami; Yuichi Douki; Koji Mahara

Archive | 2008

JIG FOR DETECTING POSTION

Toshiyuki Matsumoto; Tomohide Minami; Yuichi Douki; Koji Mahara

Archive | 2014

Thermal processing apparatus for thermal processing substrate and positioning method of positioning substrate transfer position

Yuichi Douki; Tokutarou Hayashi; Naruaki Iida; Suguru Enokida

Archive | 2013

SUBSTRATE TRANSFER APPARATUS, SUBSTRATE TRANSFER METHOD, AND NON-TRANSITORY STORAGE MEDIUM

Tokutarou Hayashi; Yuichi Douki; Hiromitsu Maejima

Explore More

Collaboration

Dive into the Yuichi Douki's collaboration.

Top Co-Authors
Avatar

Koji Mahara

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Suguru Enokida

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tokutarou Hayashi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tomohide Minami

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Toshiyuki Matsumoto

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Naruaki Iida

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Akihiro Teramoto

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Akira Miyata

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Akira Murata

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hiromitsu Maejima

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge