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Archive | 2007

Substrate processing system

Keizo Hasebe; Shinji Nagashima; Norio Semba; Masami Akimoto; Yoshio Kimura; Naruaki Iida; Kouji Harada; Issei Ueda; Nobuo Konishi


Archive | 1994

Apparatus for processing substrates having a film formed on a surface of the substrate

Mitsuhiro Nanbu; Naruaki Iida; Hideaki Gotou; Masanori Tateyama; Yuji Yoshimoto; Tomoko Ishimoto; Hidetami Yaegashi; Yasunori Kawakami; Takahide Fukuda; Akihiro Fujimoto; Takashi Takekuma; Hiroyuki Matsukawa


Archive | 1995

Method for processing wafer-shaped substrates

Masami Akimoto; Kazutoshi Yoshioka; Naruaki Iida


Archive | 1993

Apparatus for processing wafer-shaped substrates

Masami Akimoto; Kazutoshi Yoshioka; Naruaki Iida


Archive | 1996

Semiconductor wafer processing apparatus including localized humidification between coating and heat treatment sections

Mitsuhiro Nanbu; Naruaki Iida; Hideaki Gotou; Masanori Tateyama; Yuji Yoshimoto; Tomoko Ishimoto; Hidetami Yaegashi; Yasunori Kawakami; Takahide Fukuda; Akihiro Fujimoto; Takashi Takekuma; Hiroyuki Matsukawa


Archive | 1996

Method of substrate processing to form a film on multiple target objects

Mitsuhiro Nanbu; Naruaki Iida; Hideaki Gotou; Masanori Tateyama; Yuji Yoshimoto; Tomoko Ishimoto; Hidetami Yaegashi; Yasunori Kawakami; Takahide Fukuda; Akihiro Fujimoto; Takashi Takekuma; Hiroyuki Matsukawa


Archive | 2010

DEVICE AND METHOD FOR SUPPORTING A SUBSTRATE

Seiji Nakano; Michiaki Matsushita; Naruaki Iida; Suguru Enokida; Katsuhiro Morikawa


Archive | 1997

Vertical processing apparatus

Hidetami Yaegashi; Takayuki Toshima; Masami Akimoto; Eiji Yamaguchi; Junichi Kitano; Takayuki Katano; Hiroshi Shinya; Naruaki Iida


Archive | 2011

SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD AND COMPUTER-READABLE STORAGE MEDIUM

Naruaki Iida


Archive | 2013

Wafer holding member

Naruaki Iida; Hideki Kajiwara

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