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Yuri Nikolaevich Tolmachev

Samsung

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Publication

Featured researches published by Yuri Nikolaevich Tolmachev.

Archive | 2003

Gas injection apparatus for semiconductor processing system

Tae-Wan Kim; Yuri Nikolaevich Tolmachev; Dong-joon Ma; Sergiy Yakovlevich Navala

Archive | 2002

Inductively coupled plasma system

Yuri Nikolaevich Tolmachev; Dong-joon Ma; Chang-wook Moon; Heayoung P. Yoon

Archive | 2004

Ionized physical vapor deposition apparatus using helical self-resonant coil

Yuri Nikolaevich Tolmachev; Dong-joon Ma; Sergiy Yakovlevich Navala; Dae-Il Kim

Archive | 2004

High-density plasma processing apparatus

Yuri Nikolaevich Tolmachev; Sergiy Yakovlevich Navala; Dong-joon Ma; Dae-Il Kim

Archive | 2003

Inductively coupled plasma generating apparatus incorporating serpentine coil antenna

Young-Dong Lee; Yuri Nikolaevich Tolmachev; Seong-Gu Kim; Jai-Kwang Shin

Archive | 2004

Magnetron cathode and magnetron sputtering apparatus comprising the same

Sergiy Yakovlevich Navala; Yuri Nikolaevich Tolmachev; Dong-joon Ma; Tae-Wan Kim

Archive | 2005

Plasma chemical vapor deposition system and method for coating both sides of substrate

Young-soo Park; Yuri Nikolaevich Tolmachev

Archive | 2008

Plasma based ion implantation system

Young dong Lee; Yuri Nikolaevich Tolmachev; Vladimir Volynets; Vasily Pashkovskiy; Andrey Ushakov; Gyeong Su Keum; Jae Hyun Han; Dong Cheol Kim; Hyung Chul Cho

Archive | 2007

Ion analysis system based on analyzer of ion energy distribution using retarded electric field

Yung Hee Lee; Andrey Ushakov; Yuri Nikolaevich Tolmachev; Vladimir Volynets; Won Ceak Pak; Vasily Pashkovskiy

Archive | 2005

MICROWAVE FEEDER, PLASMA PROCESSING APPARATUS USING IT, AND PLASMA PROCESSING METHOD

Yuri Nikolaevich Tolmachev; Ma Dong-Joon; Kim Dae-Il; Sergiy Yakovlevich Navala

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Collaboration

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Dong-joon Ma

Samsung

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Sergiy Yakovlevich Navala

Samsung

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Vasily Pashkovskiy

Samsung

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Vladimir Volynets

Samsung

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Dae-Il Kim

Samsung

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Tae-Wan Kim

Samsung

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Andrey Ushakov

Samsung

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Jai-Kwang Shin

Samsung

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Seong-Gu Kim

Samsung

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Young dong Lee

Samsung

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