Zhang Zhicheng
Chinese Academy of Sciences
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Publication
Featured researches published by Zhang Zhicheng.
Microelectronic Engineering | 2003
Zhang Zhicheng; Ren Bingyan; Chen Yonghai; Yang Shaoyan; Wang Zhanguo
Argon gas, as a protective environment and carrier of latent heat, has an important effect on the temperature distribution in crystals and melts. Numeric simulation is a potent tool for solving engineering problems. In this paper, the relationship between argon gas flow and oxygen concentration in silicon crystals was studied systematically. A flowing stream of argon gas is described by numeric simulation for the first time. Therefore, the results of experiments can be explained, and the optimum argon flow with the lowest oxygen concentration can be achieved.
Archive | 2004
Zhang Zhicheng; Yang Shaoyan; Li Dabing
Archive | 2014
Zhang Zhicheng; Li Shuan; Fu Nan; Li Yafen; Li Rongmao; Yu Shaode; Chen Yili; Zhu Yanchun; Xie Yaoqin
Archive | 2018
Zhu Yanchun; Fu Nan; Zhang Zhicheng; Yu Shaode; Chen Yili; Xie Yaoqin
Archive | 2017
Fu Nan; Zhu Yanchun; Yu Shaode; Chen Yili; Zhang Zhicheng; Liu Shuting; Xie Yaoqin
Archive | 2017
Feng Hongtao; Zhang Zhicheng; Chen Yan; Xie Yaoqin
Archive | 2017
Liang Xiaokun; Xie Yaoqin; Zhang Zhicheng
Archive | 2017
Fu Nan; Xie Yaoqin; Zhu Yanchun; Yu Shaode; Chen Yili; Zhang Zhicheng
Archive | 2017
Zhu Yanchun; Li Yafen; Liu Yong; Zhang Zhicheng; Fu Nan; Xie Yaoqin
Archive | 2017
Liang Xiaokun; Xie Yaoqin; Zhang Zhicheng; Niu Tianye
