Zhao Lingli
Chinese Academy of Sciences
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Zhao Lingli.
Plasma Science & Technology | 2004
Li Haijiang; Wang Shouguo; Zhao Lingli; Ye Tianchun
An atmospheric pressure radio-frequency plasma jet that can eject cold plasma has been developed. In this paper, the configuration of this type of plasma jet is illustrated and its discharge characteristics curves are studied with a current and a voltage probe. A thermal couple is used to measure the temperature distribution along the axis of the jet stream. The temperature distribution curve is generated for the He/O2 jet stream at the discharge power of 150 W. This jet can etch the photo-resistant material at an average rate of 100 nm/min on the surface of silicon wafers at a right angle.
Chinese Physics | 2004
Wang Shouguo; Li Haijiang; Ye Tianchun; Zhao Lingli
Archive | 2013
Jia Shaoxia; Wang Shouguo; Yang Jinghua; Zhao Lingli
Archive | 2013
Wang Shouguo; Zhao Lingli
Archive | 2013
Wang Shouguo; Zhao Lingli; Jia Shaoxia; Han Chuanyu
Archive | 2012
Jia Shaoxia; Wang Shouguo; Zhao Lingli; Wu Yuanwei; Yang Jinghua
Archive | 2006
Wang Shouguo; Zhao Lingli
Archive | 2013
Jia Shaoxia; Wang Shouguo; Yang Jinghua; Zhao Lingli
Archive | 2013
Wang Shouguo; Zhao Lingli
Archive | 2013
Wang Shouguo; Jia Shaoxia; Zhao Lingli
