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Dive into the research topics where Zhenyu Lu is active.

Publication


Featured researches published by Zhenyu Lu.


Archive | 2015

METHOD OF MAKING A VERTICAL NAND DEVICE USING A SACRIFICIAL LAYER WITH AIR GAP AND SEQUENTIAL ETCHING OF MULTILAYER STACKS

Zhenyu Lu; Sateesh Koka; James Kai; Raghuveer S. Makala; Yao-Sheng Lee; Jayavel Pachamuthu; Johann Alsmeier; Henry Chien


Archive | 2016

Three dimensional memory device with epitaxial semiconductor pedestal for peripheral transistors

Koji Miyata; Zhenyu Lu; Andrew Lin; Daxin Mao; Jixin Yu; Johann Alsmeier; Wenguang Stephen Shi


Archive | 2015

Three-dimensional memory device containing CMOS devices over memory stack structures

Zhenyu Lu; Andrew Lin; Johann Alsmeier; Peter Rabkin; Wei Zhao; Wenguang Stephen Shi; Henry Chien; Jian Chen


Archive | 2017

Method of making a multilevel memory stack structure using a cavity containing a sacrificial fill material

Zhenyu Lu; Daxin Mao; Tong Zhang; Johann Alsmeier; Wenguang Shi; Henry Chien


Archive | 2016

Three dimensional memory device with peripheral devices under dummy dielectric layer stack and method of making thereof

Jixin Yu; Yanli Zhang; Zhenyu Lu; Johann Alsmeier; Daxin Mao


Archive | 2016

MULTI-TIER REPLACEMENT MEMORY STACK STRUCTURE INTEGRATION SCHEME

Ching-Huang Lu; Zhenyu Lu; Jixin Yu; Daxin Mao; Johann Alsmeier; Wenguang Stephen Shi; Henry Chien


Archive | 2015

Multi tier three-dimensional memory devices including vertically shared bit lines

Zhenyu Lu; Henry Chien; Johann Alsmeier; Koji Miyata; Tong Zhang; Man Mui; James Kai; Wenguang Shi; Wei Zhao; Xiaolong Hu; Jiyin Xu; Gerrit Jan Hemink; Christopher J. Petti


Archive | 2017

MULTI-TIER MEMORY DEVICE WITH THROUGH-STACK PERIPHERAL CONTACT VIA STRUCTURES AND METHOD OF MAKING THEREOF

Jixin Yu; Zhenyu Lu; Hiroyuki Ogawa; Daxin Mao; Kensuke Yamaguchi; Sung Tae Lee; Yao-Sheng Lee; Johann Alsmeier


Archive | 2015

Forming 3D memory cells after word line replacement

Zhenyu Lu; Hiro Kinoshita; Daxin Mao; Johann Alsmeier; Wenguang Shi; Yingda Dong; Henry Chien; Kensuke Yamaguchi; Xiaolong Hu


Archive | 2017

Method of fabricating 3D NAND

Ashish Baraskar; Yanli Zhang; Ching-Huang Lu; Zhenyu Lu

Collaboration


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