Daxin Mao | Researchain

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Featured researches published by Daxin Mao.

Archive | 2005

Process and composition for conductive material removal by electrochemical mechanical polishing

Zhihong Wang; You Wang; Daxin Mao; Renhe Jia; Stan D. Tsai; Yongqi Hu; Yuan A. Tian; Liang-Yuh Chen

Archive | 2009

Closed-loop control for effective pad conditioning

Sivakumar Dhandapani; Stan D. Tsai; Daxin Mao; Sameer Deshpande; Shou-sung Chang; Gregory E. Menk; Charles C. Garretson; Jason Garcheung Fung; Christopher D. Cocca; Hung Chih Chen

Archive | 2005

Method and apparatus for reduced wear polishing pad conditioning

Yan Wang; Stan D. Tsai; Yongqi Hu; Feng Q. Liu; Liang-Yuh Chen; Daxin Mao; Huyen Karen Tran; Martin S. Wohlert; Renhe Jia; Yuan A. Tian

Archive | 2006

Process and composition for electrochemical mechanical polishing

Renhe Jia; You Wang; Zhihong Wang; Jie Diao; Daxin Mao; Stan D. Tsai; Lakshmanan Karuppiah; Liang-Yuh Chen

Archive | 2004

Endpoint for electrochemical processing

Daxin Mao; Renhe Jia; Zhihong Wang; Yuan Tian; Feng Q. Liu; Vladimir Galburt; Sen Hou Ko; Stan D. Tsai; Liang-Yuh Chen

Archive | 2007

Abrasive composition for electrochemical mechanical polishing

Daxin Mao; You Wang; Junzi Zhao; Stan D. Tsai; Renhe Jia; Jie Diao; Yongqi Hu; Lakshmanan Karuppiah

208th ECS Meeting | 2006

Development of Electrochemical Mechanical Polishing for Advanced Copper Planarization

Renhe Jia; You Wang; Zhihong Wang; Stan D. Tsai; Jie Diao; Daxin Mao; Laksh Karuppiah; Liang-Yuh Chen

Archive | 2007

DETECTION OF CLEARANCE OF POLYSILICON RESIDUE

Jeffrey Drue David; Jun Qian; Garrett Ho Yee Sin; Daxin Mao; Christopher Heung-Gyun Lee; Sivakumar Dhandapani; Boguslaw A. Swedek; Dominic J. Benvegnu; Lakshmanan Karuppiah

Archive | 2006