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Dive into the research topics where Zhiyu Pan is active.

Publication


Featured researches published by Zhiyu Pan.


International Journal of Nonlinear Sciences and Numerical Simulation | 2002

Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

Huikai Xie; Gary K. Fedder; Zhiyu Pan; Wilhelm Frey

Phase is an important issue in a vibratory-rate gyroscope for Coriolis signal demodulation and off-axis motion compensation. This paper uses a simplified three-dimensional comb model to analyze the motion coupling and the phase relation between the Coriolis signal and coupled signals for a lateral-axis CMOS-MEMS gyroscope. It is found that the off-axis motion is highly nonlinear and dominates the coupled motions in the comb-drive actuation. The phase relation was verified experimentally.


Archive | 2005

Mems resonator array structure and method of operating and using same

Markus Lutz; Aaron Partridge; Zhiyu Pan


Archive | 2006

Breath-mode ring resonator structure, and method of designing, operating and using same

Zhiyu Pan; Aaron Partridge; Markus Lutz


Archive | 2007

MEMS resonator structure and method

Markus Lutz; Zhiyu Pan; Aaron Partridge


Archive | 2003

Method of fabricating microstructures and devices made therefrom

Huikai Xie; Gary K. Fedder; Zhiyu Pan; Wilhelm Frey


Journal of the Acoustical Society of America | 2008

In-plane mechanically coupled microelectromechanical tuning fork resonators

Zhiyu Pan; Rob N. Candler; Markus Lutz; Aaron Partridge; Volker Materna; Gary Yama; Wilhelm Frey


Archive | 2006

Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement

Zhiyu Pan; Christoph Lang; Gary Yama


Archive | 2006

Tri-axis accelerometer having a single proof mass and fully differential output signals

Zhiyu Pan; Christoph Lang; Gary Yama; Matthias Metz; Markus Ulm


Archive | 2007

MEMS resonator array structure

Markus Lutz; Aaron Partridge; Zhiyu Pan


Archive | 2004

Differential in-plane tunneling current sensor

Andreas Niendorf; Wilhelm Frey; Zhiyu Pan

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Gary K. Fedder

Carnegie Mellon University

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Rob N. Candler

University of California

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