Wilhelm Frey
Bosch
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Publication
Featured researches published by Wilhelm Frey.
Sensors and Actuators A-physical | 1999
Hans Artmann; Wilhelm Frey
Abstract The characteristics of vibrating microsystems are strongly influenced by air damping. With a porous silicon (PorSi) sacrificial layer technique, the substrate gap is enhanced by a factor of >10 to obtain high Q . Test structures with substrate gaps up to 100 μm and roughness Q factor measurements with electrostatic-driven test structures demonstrating a Q factor increase of about 100% at ambient pressure are presented and discussed.
Sensors and Actuators A-physical | 2003
W. Robert Ashurst; Carlo Carraro; Roya Maboudian; Wilhelm Frey
Archive | 2005
Markus Lutz; Aaron Partridge; Wilhelm Frey; Markus Ulm; Matthias Metz; Brian Stark; Gary Yama
Archive | 1999
Hans Artmann; Wilhelm Frey; Manfred Moellendorf
Archive | 1998
Karsten Funk; Franz Laermer; Bernhard Elsner; Wilhelm Frey
Archive | 1997
Franz Laermer; Bernhard Elsner; Wilhelm Frey
Archive | 1998
Karsten Funk; Wilhelm Frey
Archive | 1997
Karsten Funk; Franz Laermer; Bernhard Elsner; Wilhelm Frey
Archive | 2000
Andreas Niendorf; Wilhelm Frey; Karsten Funk
Journal of the Acoustical Society of America | 2008
Zhiyu Pan; Rob N. Candler; Markus Lutz; Aaron Partridge; Volker Materna; Gary Yama; Wilhelm Frey
