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Aaron Miller

Applied Materials

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Publication

Featured researches published by Aaron Miller.

Archive | 2016

Injector For Spatially Separated Atomic Layer Deposition Chamber

Joseph Yudovsky; Kevin Griffin; Aaron Miller; Jeff Tobin; Eran Newman; Tatsuya E. Sato; Patricia M. Liu

Archive | 2014

APPARATUS FOR REDUCING THE EFFECT OF CONTAMINATION ON A RAPID THERMAL PROCESS

Aaron Miller; Mehran Behdjat; Norman L. Tam; Michael Liu

Archive | 2016

INJECT INSERT FOR EPI CHAMBER

Shu-Kwan Lau; Mehmet Tugrul Samir; Aaron Miller

Archive | 2017

Showerhead for a semiconductor processing chamber

Lara Hawrylchak; Kong Lung Samuel Chan; Aaron Miller

Archive | 2017

A adapter and banks spare for handle cavity

Aaron Miller; Oleg V. Serebryanov; Joseph M. Ranish

Archive | 2016

ATMOSPHERIC EPITAXIAL DEPOSITION CHAMBER

Shu-Kwan Lau; Mehmet Tugrul Samir; Nyi O. Myo; Aaron Miller; Aaron Muir Hunter; Errol Antonio C. Sanchez; Paul Brillhart; Joseph M. Ranish; Dennis L. Demars; Satheesh Kuppurao

Archive | 2016

Susceptor and pre-heat ring for thermal processing of substrates

Shu-Kwan Lau; Mehmet Tugrul Samir; Aaron Miller

Archive | 2016

IMPROVED APPARATUS FOR DECREASING SUBSTRATE TEMPERATURE NON-UNIFORMITY

Aaron Miller; Norman L. Tam; Michael Liu

Archive | 2016

Injecteur amélioré pour chambre de dépôt spatial de couches atomiques

Joseph Yudovsky; Kevin Griffin; Aaron Miller; Jeff Tobin; Eran Newman; Tatsuya E. Sato; Patricia M. Liu

Archive | 2016

Improved injector for spatially separated atomic layer deposition chamber

Joseph Yudovsky; Kevin Griffin; Aaron Miller; Jeff Tobin; Eran Newman; Tatsuya E. Sato; Patricia M. Liu

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Mehmet Tugrul Samir

Applied Materials

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Shu-Kwan Lau

Applied Materials

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Eran Newman

Applied Materials

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Jeff Tobin

Applied Materials

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Joseph Yudovsky

Applied Materials

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Kevin Griffin

Applied Materials

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Michael Liu

Applied Materials

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Norman L. Tam

Applied Materials

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Patricia M. Liu

Applied Materials

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Tatsuya E. Sato

Applied Materials

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