Abbas Ali

Method for forming high-density integrated circuit capacitors

HSQ/SOG dry strip process

Low-K dielectric etch process for dual-damascene structures

BARC/resist via etchback process

Method of Planarizing a Semiconductor Device

VERY HIGH ASPECT RATIO CONTACT

ETCHING HIGH K DIELECTRIC FILMS WITH REDUCED LIKELIHOOD OF DELAMINATION

INTEGRATED TRENCH CAPACITOR WITH TOP PLATE HAVING REDUCED VOIDS

Substrate contact having substantially straight sidewalls to a top surface of the substrate

NOVEL SUBSTRATE CONTACT ETCH PROCESS