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Adam L. Olson

Micron Technology

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Publication

Featured researches published by Adam L. Olson.

Proceedings of SPIE | 2011

Reduction of micro-bridging defects for 193nm immersion resist

Lijing Gou; Vinay Nair; Hiroyuki Mori; Adam L. Olson; David Swindler; Anton deVilliers

Factors such as post-develop hydrophobicity, polymer aggregation and acid diffusion length are driving forces in the formation of micro bridging defects. In this report, solutions for each possible cause are proposed and tested. It is proven that micro-bridging levels can be significantly reduced through a multi-tiered approach.

Archive | 2010

METHODS OF ISOLATING ARRAY FEATURES DURING PITCH DOUBLING PROCESSES AND SEMICONDUCTOR DEVICE STRUCTURES HAVING ISOLATED ARRAY FEATURES

Adam L. Olson

Archive | 2011

Methods of Processing Semiconductor Substrates In Forming Scribe Line Alignment Marks

William R. Brown; David A. Kewley; Adam L. Olson

Archive | 2012

Methods of forming features in semiconductor device structures

Adam L. Olson; Kaveri Jain; Lijing Gou; William R. Brown; Ho Seop Eom; Xue Chen; Anton deVilliers

Archive | 2012

METHODS FOR FORMING RESIST FEATURES, PATTERNS IN A RESIST, AND ARRAYS OF ALIGNED, ELONGATE RESIST FEATURES

Kaveri Jain; Adam L. Olson; William R. Brown; Lijing Gou; Ho Seop Eom; Anton deVilliers

Archive | 2013

Methods of forming nanostructures including metal oxides

Nicholas Hendricks; Adam L. Olson; William R. Brown; Ho Seop Eom; Xue Chen; Kaveri Jain; Scott Schuldenfrei

Archive | 2013

METHODS OF FORMING NANOSTRUCTURES INCLUDING METAL OXIDES AND SEMICONDUCTOR STRUCTURES INCLUDING SAME

Nicholas Hendricks; Adam L. Olson; William R. Brown; Ho Seop Eom; Xue Chen; Kaveri Jain; Scott Schuldenfrei

Archive | 2017

METHODS OF FORMING SEMICONDUCTOR DEVICE STRUCTURES INCLUDING STAIR STEP STRUCTURES, AND RELATED SEMICONDUCTOR DEVICE STRUCTURES AND SEMICONDUCTOR DEVICES

Matthew Park; Adam L. Olson; Jixin Yu

Archive | 2013

Methods of forming patterns by using a brush layer and masks

William R. Brown; Adam L. Olson; Kaveri Jain; Ho Seop Eom; Xue Gloria Chen; Nik Mirin; Dan B. Millward; Peter Trefonas; Phillip Dene Hustad; Jong Keun Park; Christopher Nam Lee

Archive | 2012

Methods for forming resist features and arrays of aligned, elongate resist features

Kaveri Jain; Adam L. Olson; William R. Brown; Lijing Gou; Ho Seop Eom; Anton deVilliers

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William R. Brown

Micron Technology

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Ho Seop Eom

Micron Technology

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Kaveri Jain

Micron Technology

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Lijing Gou

Micron Technology

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Xue Chen

Micron Technology

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Anton deVilliers

Micron Technology

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Nicholas Hendricks

Micron Technology

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Scott Schuldenfrei

Micron Technology

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Hiroyuki Mori

Micron Technology

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Christopher Nam Lee

Micron Technology

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