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Ajey M. Joshi

Applied Materials

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Publication

Featured researches published by Ajey M. Joshi.

Archive | 1997

Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of (CH3F or CH2F2) and CF4 and O2

Cynthia B. Brooks; Walter R. Merry; Ajey M. Joshi; Gladys D. Quinones; Jitske Trevor

Archive | 2002

Self-aligned contact etch with high sensitivity to nitride shoulder

Ajey M. Joshi; Pui Man Agnes Ng; James A. Stinnett; Usama Dadu; Jason Regis

Archive | 1997

Impedance-matching network

Richard R. Mett; Robert D. Greenway; Gabriel Bilek; Ajey M. Joshi

Archive | 2006

Method of controlling silicon-containing polymer build up during etching by using a periodic cleaning step

Taeho Shin; Jingbao Liu; Ajey M. Joshi; Jong Mun Kim; Wei-Te Wu

Archive | 2008

HALOGEN-FREE AMORPHOUS CARBON MASK ETCH HAVING HIGH SELECTIVITY TO PHOTORESIST

Jong Mun Kim; Judy Wang; Ajey M. Joshi; Jingbao Liu; Bryan Pu

Archive | 2013

THREE-DIMENSIONAL (3D) PROCESSING AND PRINTING WITH PLASMA SOURCES

Kartik Ramaswamy; Troy S. Detrick; Srinivas D. Nemani; Ajey M. Joshi

Archive | 2014

Apparatus for material spray deposition of high solid percentage slurries for battery active material manufacture applications

Hooman Bolandi; Mahendra C. Orilall; Ajey M. Joshi; Connie P. Wang; Robert Z. Bachrach

Archive | 2008

Method of controlling sidewall profile by using intermittent, periodic introduction of cleaning species into the main plasma etching species

Taeho Shin; Jingbao Liu; Ajey M. Joshi; Jong Mun Kim; Wei-Te Wu

Archive | 2006

Stabilizing an opened carbon hardmask

Taeho Shin; Ajey M. Joshi; Zhuang Li; Wei-Te Wu; Jin Chul Son; Jong Hun Choi

Archive | 1998

High efficiency impedance matching network

Gabriel Bilek; Robert D. Greenway; Ajey M. Joshi; Richard R. Mett

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Ashavani Kumar

Applied Materials

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Kasiraman Krishnan

Applied Materials

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Hou T. Ng

Applied Materials

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Nag B. Patibandla

Applied Materials

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Bernard Frey

Applied Materials

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Bharath Swaminathan

Applied Materials

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Eric Ng

Applied Materials

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Jingbao Liu

Applied Materials

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Jong Mun Kim

Applied Materials

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Gabriel Bilek

Applied Materials

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