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Jingbao Liu

Applied Materials

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Publication

Featured researches published by Jingbao Liu.

Archive | 2000

Etch method using a dielectric etch chamber with expanded process window

Jingbao Liu; Judy Wang; Takehiko Komatsu; Bryan Pu; Kenny L. Doan; Claes Bjorkman; Melody Chang; Yunsang Kim; Hongching Shan; Ruiping Wang

Archive | 2004

Plasma control using dual cathode frequency mixing

Steven Shannon; Dennis S. Grimard; Theodoros Panagopoulos; Daniel J. Hoffman; Michael G. Chafin; Troy S. Detrick; Alexander Paterson; Jingbao Liu; Taeho Shin; Bryan Pu

Archive | 2000

Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas

Jingbao Liu; Takehiko Komatsu; Hongqing Shan; Keiji Horioka; Bryan Pu

Archive | 2003

Apparatus for uniformly etching a dielectric layer

Kenny L. Doan; Yunsang Kim; Mahmoud Dahimene; Jingbao Liu; Bryan Pu; Hongqing Shan; Don E. Curry

Archive | 2006

Method of controlling silicon-containing polymer build up during etching by using a periodic cleaning step

Taeho Shin; Jingbao Liu; Ajey M. Joshi; Jong Mun Kim; Wei-Te Wu

Archive | 2002

Magnetically enhanced plasma oxide etch using hexafluorobutadiene

Jingbao Liu; Takehiko Komatsu; Hongqing Shan; Keiji Horioka; Bryan Pu

Archive | 2006

Plasma etch reactor with distribution of etch gases across a wafer surface and a polymer oxidizing gas in an independently fed center gas zone

Jong Mun Kim; Jingbao Liu; Bryan Pu

Archive | 2004

Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor

Roger Alan Lindley; Jingbao Liu; Bryan Pu; Keiji Horioka

Archive | 2002

Ashable layers for reducing critical dimensions of integrated circuit features

Hongqing Shan; Kenny L. Doan; Jingbao Liu; Michael Barnes; Huong Thanh Nguyen; Christopher Dennis Bencher; Christopher S. Ngai; Wendy H. Yeh; Eda Tuncel; Claes Bjorkman

Archive | 2006

Plasma etch process using etch uniformity control by using compositionally independent gas feed

Jong Mun Kim; Jingbao Liu; Bryan Pu

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Bryan Pu

Applied Materials

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Jong Mun Kim

Applied Materials

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Hongqing Shan

Applied Materials

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Ajey M. Joshi

Applied Materials

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Claes Bjorkman

Applied Materials

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Judy Wang

Applied Materials

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Kenny L. Doan

Applied Materials

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Taeho Shin

Applied Materials

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Takehiko Komatsu

Applied Materials

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Keiji Horioka

Applied Materials

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