Jingbao Liu | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Jingbao Liu is active.

Explore More

Publication

Featured researches published by Jingbao Liu.

Archive | 2000

Etch method using a dielectric etch chamber with expanded process window

Jingbao Liu; Judy Wang; Takehiko Komatsu; Bryan Pu; Kenny L. Doan; Claes Bjorkman; Melody Chang; Yunsang Kim; Hongching Shan; Ruiping Wang

Archive | 2004

Plasma control using dual cathode frequency mixing

Steven Shannon; Dennis S. Grimard; Theodoros Panagopoulos; Daniel J. Hoffman; Michael G. Chafin; Troy S. Detrick; Alexander Paterson; Jingbao Liu; Taeho Shin; Bryan Pu

Archive | 2000

Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas

Jingbao Liu; Takehiko Komatsu; Hongqing Shan; Keiji Horioka; Bryan Pu

Archive | 2003

Apparatus for uniformly etching a dielectric layer

Kenny L. Doan; Yunsang Kim; Mahmoud Dahimene; Jingbao Liu; Bryan Pu; Hongqing Shan; Don E. Curry

Archive | 2006

Method of controlling silicon-containing polymer build up during etching by using a periodic cleaning step

Taeho Shin; Jingbao Liu; Ajey M. Joshi; Jong Mun Kim; Wei-Te Wu

Archive | 2002

Magnetically enhanced plasma oxide etch using hexafluorobutadiene

Jingbao Liu; Takehiko Komatsu; Hongqing Shan; Keiji Horioka; Bryan Pu

Archive | 2006

Plasma etch reactor with distribution of etch gases across a wafer surface and a polymer oxidizing gas in an independently fed center gas zone

Jong Mun Kim; Jingbao Liu; Bryan Pu

Archive | 2004

Method and apparatus for shaping a magnetic field in a magnetic field-enhanced plasma reactor

Roger Alan Lindley; Jingbao Liu; Bryan Pu; Keiji Horioka

Archive | 2002

Ashable layers for reducing critical dimensions of integrated circuit features

Hongqing Shan; Kenny L. Doan; Jingbao Liu; Michael Barnes; Huong Thanh Nguyen; Christopher Dennis Bencher; Christopher S. Ngai; Wendy H. Yeh; Eda Tuncel; Claes Bjorkman

Archive | 2006