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Jong Mun Kim

Applied Materials

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Publication

Featured researches published by Jong Mun Kim.

Archive | 2011

METHODS FOR ETCHING OXIDE LAYERS USING PROCESS GAS PULSING

Jairaj Payyapilly; Jong Mun Kim; Kenny L. Doan; Li Ling

Archive | 2012

METHOD OF ETCHING HIGH ASPECT RATIO FEATURES IN A DIELECTRIC LAYER

Jong Mun Kim; Kenny L. Doan; Li Ling; Jairaj Payyapilly; Daisuke Shimuzu; Srinivas D. Nemani; Thorsten Lill

Archive | 2012

Plasma etch processes for boron-doped carbonaceous mask layers

Jong Mun Kim; Jairaj Payyapilly; Kenny L. Doan

Archive | 2014

BORON-DOPED CARBON-BASED HARDMASK ETCH PROCESSING

Kenny L. Doan; Jong Mun Kim; Daisuke Shimizu

Archive | 2013

METHODS FOR ETCHING MATERIALS USING SYNCHRONIZED RF PULSES

Jong Mun Kim; Daisuke Shimizu; Katsumasa Kawasaki; Sergio Fukuda Shoji

Archive | 2014

SILICON DIOXIDE-POLYSILICON MULTI-LAYERED STACK ETCHING WITH PLASMA ETCH CHAMBER EMPLOYING NON-CORROSIVE ETCHANTS

Daisuke Shimizu; Jong Mun Kim

Semiconductor international | 2009

Advanced DRAMs Drive : High-AR Etch Advances

Steven Welch; Kathryn Keswick; Phillip Stout; Jong Mun Kim; Wonseok Lee; Chris Ying; Kenny L. Doan; Bryan Pu; Hun Sang Kim

Archive | 2014

ETCHING OXIDE-NITRIDE STACKS USING C4F6H2

Jong Mun Kim; Kenny L. Doan; Li Ling; Jairaj Payyapilly; Srinivas D. Nemani; Daisuke Shimizu; Yuju Huang

Archive | 2013

MAINTAINING MASK INTEGRITY TO FORM OPENINGS IN WAFERS

Daisuke Shimizu; Jong Mun Kim

Archive | 2012

Method for etching substrate

Kenny L. Doan; Jong Mun Kim

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Collaboration

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Kenny L. Doan

Applied Materials

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Jairaj Payyapilly

Applied Materials

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Daisuke Shimizu

Applied Materials

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Li Ling

Applied Materials

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Sergio Fukuda Shoji

Applied Materials

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Hamid Noorbakhsh

Applied Materials

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Jason Della Rosa

Applied Materials

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Katsumasa Kawasaki

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Wonseok Lee

Applied Materials

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