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Akella V. S. Satya

KLA-Tencor

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Publication

Featured researches published by Akella V. S. Satya.

Archive | 2000

Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices

Akella V. S. Satya; David L. Adler; Bin-Ming Benjamin Tsai; David J. Walker

Archive | 2002

Methods and systems for predicting IC chip yield

Akella V. S. Satya; Li Song; Robert Thomas Long; Kurt H. Weiner

Archive | 2003

Test structures and methods for inspection of semiconductor integrated circuits

Akella V. S. Satya; Gustavo A. Pinto; David L. Adler; Robert Thomas Long; Neil Richardson; Kurt H. Weiner; David J. Walker; Lynda C. Mantalas

Archive | 2003

Multiple directional scans of test structures on semiconductor integrated circuits

Gustavo A. Pinto; Brian C. Leslie; David L. Adler; Akella V. S. Satya; Robert Thomas Long; David J. Walker

Archive | 2000

Stepper type test structures and methods for inspection of semiconductor integrated circuits

Akella V. S. Satya; David L. Adler; Neil Richardson; Gustavo A. Pinto; David J. Walker

Archive | 2002

Inspectable buried test structures and methods for inspecting the same

Akella V. S. Satya; Robert Thomas Long; Lynda C. Mantalas; Gustavo A. Pinto; Neil Richardson

Archive | 2002

Apparatus and methods for managing reliability of semiconductor devices

Akella V. S. Satya; Li Song; Robert Thomas Long; Kurt H. Weiner

Archive | 2002

Apparatus and methods for determining critical area of semiconductor design data

Akella V. S. Satya; Vladimir D. Federov; Li Song

Archive | 2000

Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures

Akella V. S. Satya; Brian C. Leslie; Gustavo A. Pinto; Robert Thomas Long; Neil Richardson; Bin-Ming Benjamin Tsai

Archive | 2000

Methods and apparatus for optimizing semiconductor inspection tools

Akella V. S. Satya; Gustavo A. Pinto; Robert Thomas Long; Bin-Ming Benjamin Tsai; Brian C. Leslie

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Gustavo A. Pinto

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Robert Thomas Long

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David J. Walker

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David L. Adler

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Neil Richardson

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Kurt H. Weiner

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Lynda C. Mantalas

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Bin-Ming Benjamin Tsai

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Brian C. Leslie

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Li Song

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