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Neil Richardson

KLA-Tencor

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Featured researches published by Neil Richardson.

Microelectronic Engineering | 1988

IDS 5000: An integrated diagnostic system for VLSI

Stefano Concina; Neil Richardson

This paper describes the implementation of a mouse and window-driven Electron-Beam prober, intended for use by IC designers for debugging VLSI circuits. A worksation enables on-line access to the schematic, physical layout and test data, which is displayed in a format with which the designer is familiar so that little training is necessary to operate the system.

Archive | 2003

Test structures and methods for inspection of semiconductor integrated circuits

Akella V. S. Satya; Gustavo A. Pinto; David L. Adler; Robert Thomas Long; Neil Richardson; Kurt H. Weiner; David J. Walker; Lynda C. Mantalas

Archive | 2000

Stepper type test structures and methods for inspection of semiconductor integrated circuits

Akella V. S. Satya; David L. Adler; Neil Richardson; Gustavo A. Pinto; David J. Walker

Archive | 2002

Inspectable buried test structures and methods for inspecting the same

Akella V. S. Satya; Robert Thomas Long; Lynda C. Mantalas; Gustavo A. Pinto; Neil Richardson

Archive | 1998

Electron beam dose control for scanning electron microscopy and critical dimension measurement instruments

Neil Richardson; Farid Askary; Stefano Concina; Kevin M. Monahan; David L. Adler

Archive | 2000

Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures

Akella V. S. Satya; Brian C. Leslie; Gustavo A. Pinto; Robert Thomas Long; Neil Richardson; Bin-Ming Benjamin Tsai

Archive | 2000

Dual probe test structures for semiconductor integrated circuits

Akella V. S. Satya; David L. Adler; Neil Richardson; Kurt H. Weiner; David J. Walker

Archive | 2000

Continuous movement scans of test structures on semiconductor integrated circuits

Akella V. S. Satya; David L. Adler; Bin-Ming Benjamin Tsai; Neil Richardson; David J. Walker

Archive | 2000

Improved test structures and methods for inspecting and utilizing the same

Akella V. S. Satya; Gustavo A. Pinto; David L. Adler; Robert Thomas Long; Neil Richardson; Kurt H. Weiner; David J. Walker; Lynda C. Mantalas

Archive | 2010

Systems and Methods for Determining One or More Characteristics of a Specimen Using Radiation in the Terahertz Range

Ady Levy; Samuel Ngai; Christopher F. Bevis; Stefano Concina; Walter D. Mieher; Dieter Mueller; Neil Richardson; Dan Wack; Larry Wagner

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David L. Adler

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Akella V. S. Satya

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David J. Walker

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Gustavo A. Pinto

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Robert Thomas Long

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Stefano Concina

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Kurt H. Weiner

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Lynda C. Mantalas

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Ady Levy

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Bin-Ming Benjamin Tsai

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