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Akinori Kitamura

Tokyo Electron

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Publication

Featured researches published by Akinori Kitamura.

Archive | 2015

METHOD FOR ETCHING SILICON LAYER AND PLASMA PROCESSING APPARATUS

Akinori Kitamura; Eiji Suzuki

Archive | 2008

Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium

Isamu Sakuragi; Akinori Kitamura; Tsutomu Hiroki; Takehiro Shindo

Archive | 2007

PLASMA ETCHING METHOD, PLASMA ETCHING DEVICE, CONTROL PROGRAM AND COMPUTER STORAGE MEDIUM

Mare Hirai; Masanobu Honda; Akinori Kitamura; Kumiko Yamazaki; 彰規 北村; 久美子 山▲崎▼; 希 平井; 昌伸 本田

Archive | 2006

Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, control program and computer storage medium

Akinori Kitamura; Masanobu Honda; Nozomi Hirai; Masahiro Nakamura; Tatsuya Sugimoto

Archive | 2005

Etching gas, etching method and etching gas evaluation method

Masanobu Honda; Akinori Kitamura; Kazuya Nagaseki

Archive | 2014

Method of selectively removing a region formed of silicon oxide and plasma processing apparatus

Akinori Kitamura; Hiroto Ohtake; Eiji Suzuki

Archive | 2007

Bsp removing method, bsp removing device, substrate treatment apparatus, and storage medium

Tsutomu Hiroki; Akinori Kitamura; Isamu Sakuragi; Takehiro Shindo; 彰規 北村; 勤 広木; 健弘 新藤; 勇 櫻木

Archive | 2004

Etching gas, etching method, and method for estimating etching gas

Masanobu Honda; Akinori Kitamura; Kazuya Nagaseki; 彰規 北村; 昌伸 本田; 一也 永関

Archive | 2009

METHOD OF CHECKING SUBSTRATE EDGE PROCESSING APPARATUS

Kumiko Yamazaki; Isamu Sakuragi; Akinori Kitamura

Archive | 2007

Ｂｓｐ除去方法、ｂｓｐ除去装置、基板処理装置、及び記憶媒体

Tsutomu Hiroki; Akinori Kitamura; Isamu Sakuragi; Takehiro Shindo; 彰規 北村; 勤 広木; 健弘 新藤; 勇 櫻木

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Collaboration

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Masanobu Honda

Tokyo Electron

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Isamu Sakuragi

Tokyo Electron

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Kumiko Yamazaki

Tokyo Electron

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Takehiro Shindo

Tokyo Electron

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Tsutomu Hiroki

Tokyo Electron

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Eiji Suzuki

Tokyo Electron

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Kazuya Nagaseki

Tokyo Electron

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Hiroto Ohtake

Tokyo Electron

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Masahiro Nakamura

Tokyo Electron

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Nozomi Hirai

Tokyo Electron

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