Is this you? Create Your Porfile
Avatar

Tsutomu Hiroki

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Tsutomu Hiroki is active.

Explore More

Publication

Featured researches published by Tsutomu Hiroki.

Archive | 2003

Substrate processing device

Takaaki Matsuoka; Katsuhiko Iwabuchi; Shigeru Ishizawa; Tsutomu Hiroki

Archive | 1999

Semiconductor processing apparatus

Tsutomu Hiroki

Archive | 1992

Transfer device for transferring a substrate

Tsutomu Hiroki; Teruo Asakawa

Archive | 2012

SUBSTRATE HOLDER, SUBSTRATE TRANSFER APPARATUS, AND SUBSTRATE PROCESSING APPARATUS

Tsutomu Hiroki

Archive | 2003

TRANSFER SYSTEM FOR CONVEYING LCD GLASS SUBSTRATE

Tsutomu Hiroki

Archive | 2008

SUBSTRATE TRANSFER DEVICE, SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

Tsutomu Hiroki

Archive | 2001

Transportation system and processing apparatus employing the transportation system

Tsutomu Hiroki

Archive | 2004

Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system

Tsutomu Hiroki

Archive | 2005

Equipment And Method For Processing Semiconductor

Tsutomu Hiroki

Archive | 2004

Transportation apparatus and drive mechanism

Hiroaki Saeki; Shigeru Ishizawa; Takehiro Shindo; Tsutomu Hiroki; Wataru Machiyama

Explore More

Collaboration

Dive into the Tsutomu Hiroki's collaboration.

Top Co-Authors
Avatar

Hiroaki Saeki

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shigeru Ishizawa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Takehiro Shindo

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Wataru Machiyama

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Akinori Kitamura

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hiroshi Koizumi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Isamu Sakuragi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Katsuhiko Iwabuchi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shinya Sakurai

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Takaaki Matsuoka

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge