Akira Akimoto
Osaka City University
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Publication
Featured researches published by Akira Akimoto.
Advances in Resist Technology and Processing IV | 1987
Akira Akimoto; Toru Seita; Yoshitaka Tsutsumi
Electron beam exposure characteristics,such as sensitivity and contrast,and durability against oxygen plasma were measured with poly(1-pheny1-2.2.2-trifluoroethyl-α-chloro-acrylate) PCLTF prepared by solution free radical polymerization. New developers were examined for this type of polymer. Using mixtures of diisobutyl ketone DIBK and isopropyl alcohol IPA (35:65),PCLTF was preciously imaged at 25pc/cm2(0.5μm lines and spaces). Moreover with use of suitable mixture of diisopropyl ketone DIPK and isopropyl alcohol (35:65),the image at 8pc/cm2(1μm lines & spaces) is also possible. PCLTF was 1.5 times the high dry etching durability of PMMA against oxygen plasma,and showed considerably high contrast and fine gaps as narrow as 0.2μm.
Journal of Applied Polymer Science | 1986
Kiyohide Matsui; Etsuko Tobita; Kikuo Sugimoto; Kiyosi Kondo; Toru Seita; Akira Akimoto
Archive | 1984
Kiyohide Matsui; Yoshiyuki Kikuchi; Tamejiro Hiyama; Etsuko Tobita; Kiyosi Kondo; Akira Akimoto; Toru Seita; Hiroyuki Watanabe
Archive | 1983
Kiyohide Matsui; Yoshiyuki Kikuchi; Tamejiro Hiyama; Etsuko Tobita; Kiyoshi Kondo; Akira Akimoto; Toru Seita; Hiroyuki Watanabe
Archive | 1983
Akira Akimoto; Etsuko Hida; Toru Kiyota; Sei Kondo; Kiyohide Matsui
Journal of Applied Polymer Science | 1968
Takayuki Otsu; Akira Akimoto; Shuzo Aoki
Journal of Polymer Science Part A | 1973
Akira Akimoto
Journal of Polymer Science Part A | 1972
Akira Akimoto
Journal of Applied Polymer Science | 1973
Akira Akimoto
Journal of Polymer Science Part A | 1970
Shuzo Aoki; Akira Akimoto; Chiaki Shirafuji; Takayuki Otsu
