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Akira Akimoto

Osaka City University

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Advances in Resist Technology and Processing IV | 1987

High Resolution Positive E-Beam Resist With Dry Etch Durability

Akira Akimoto; Toru Seita; Yoshitaka Tsutsumi

Electron beam exposure characteristics,such as sensitivity and contrast,and durability against oxygen plasma were measured with poly(1-pheny1-2.2.2-trifluoroethyl-α-chloro-acrylate) PCLTF prepared by solution free radical polymerization. New developers were examined for this type of polymer. Using mixtures of diisobutyl ketone DIBK and isopropyl alcohol IPA (35:65),PCLTF was preciously imaged at 25pc/cm2(0.5μm lines and spaces). Moreover with use of suitable mixture of diisopropyl ketone DIPK and isopropyl alcohol (35:65),the image at 8pc/cm2(1μm lines & spaces) is also possible. PCLTF was 1.5 times the high dry etching durability of PMMA against oxygen plasma,and showed considerably high contrast and fine gaps as narrow as 0.2μm.

Journal of Applied Polymer Science | 1986

Novel anion exchange membranes having fluorocarbon backbone: Preparation and stability

Kiyohide Matsui; Etsuko Tobita; Kikuo Sugimoto; Kiyosi Kondo; Toru Seita; Akira Akimoto

Archive | 1984

Fluorocarbon anion exchangers and processes for their preparation

Kiyohide Matsui; Yoshiyuki Kikuchi; Tamejiro Hiyama; Etsuko Tobita; Kiyosi Kondo; Akira Akimoto; Toru Seita; Hiroyuki Watanabe

Archive | 1983

Fluorocarbon polymers and processes for their preparation

Kiyohide Matsui; Yoshiyuki Kikuchi; Tamejiro Hiyama; Etsuko Tobita; Kiyoshi Kondo; Akira Akimoto; Toru Seita; Hiroyuki Watanabe

Archive | 1983

Fluorine-containing bipolar membrane

Akira Akimoto; Etsuko Hida; Toru Kiyota; Sei Kondo; Kiyohide Matsui

Journal of Applied Polymer Science | 1968

Polymerization of propylene oxide with Ziegler‐Natta catalysts

Takayuki Otsu; Akira Akimoto; Shuzo Aoki

Journal of Polymer Science Part A | 1973

Copolymerization of epichlorhydrin with maleic anhydride catalyzed by Zn(acac)2

Akira Akimoto

Journal of Polymer Science Part A | 1972

Polymerization of methyl methacrylate with AlEt3–VOCl3–dimethyl sulfoxide system

Akira Akimoto

Journal of Applied Polymer Science | 1973

Vinyl bromide polymerization with alkylboron and alkyl halide catalyst

Akira Akimoto

Journal of Polymer Science Part A | 1970

Metal-containing initiator systems. XXIII. Effect of solvents on radical polymerization of methyl methacrylate initiated by metal-alkyl halide systems

Shuzo Aoki; Akira Akimoto; Chiaki Shirafuji; Takayuki Otsu

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Kiyohide Matsui

Kyoto University

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Toru Seita

Tosoh

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Hiroyuki Watanabe

Akita University

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Kiyoshi Kondo

Osaka University

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Shuzo Aoki

Osaka City University

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Takayuki Otsu

Osaka City University

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Kiyosi Kondo

Princeton University

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Chiaki Shirafuji

Osaka City University

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Tamejiro Hiyama

Chuo University

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Yoshitaka Tsutsumi

Tosoh

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