Is this you? Create Your Porfile
Avatar

Masashi Sugishita

Hitachi

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Masashi Sugishita is active.

Explore More

Publication

Featured researches published by Masashi Sugishita.

Archive | 2008

SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE PROCESSING METHOD

Masashi Sugishita; Masaaki Ueno; Akira Hayashida

Archive | 2008

Substrate processing method and semiconductor manufacturing apparatus

Masashi Sugishita; Masaaki Ueno; Akira Hayashida

Archive | 2011

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF SUBSTRATE PROCESSING APPARATUS, AND HEATING METHOD OF SUBSTRATE PROCESSING APPARATUS

Shinobu Sugiura; Masaaki Ueno; Kazuo Tanaka; Masashi Sugishita; Hideto Yamaguchi; Kenji Shirako

Archive | 2009

Temperature regulating method, thermal processing system and semiconductor device manufacturing method

Masashi Sugishita; Masaaki Ueno

Archive | 2005

Temperature adjusting method, heat treatment equipment and semiconductor device manufacturing method

Masashi Sugishita; Masaaki Ueno

Archive | 2007

Substrate processing apparatus, method of manufacturing semiconductor device, and heating apparatus

Akira Hayashida; Masaaki Ueno; Masakazu Shimada; Yukinori Aburatani; Tomoyuki Yamada; Sieyo Nakashima; Masashi Sugishita

Archive | 2009

Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method

Masashi Sugishita; Masaaki Ueno; Tsukasa Iida; Susumu Nishiura; Masao Aoyama; Kenichi Fujimoto; Yoshihiko Nakagawa; Hiroyuki Mitsui

Archive | 2007

Temperature Adjustment Method

Masashi Sugishita; Masaaki Ueno

Archive | 2011

Substrate processing apparatus capable of switching control mode of heater

Shinobu Sugiura; Masaaki Ueno; Kazuo Tanaka; Masashi Sugishita; Hideto Yamaguchi; Kenji Shirako

Archive | 2008

Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices

Akira Hayashida; Masaaki Ueno; Masakazu Shimada; Masashi Sugishita; Toshimitsu Miyata; Kimio Kitamura; Kenji Tanaka; Jyunichi Nishihara

Explore More

Collaboration

Dive into the Masashi Sugishita's collaboration.

Top Co-Authors
Avatar

Masaaki Ueno

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Akira Hayashida

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Masakazu Shimada

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Hideto Yamaguchi

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Kenji Shirako

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Shinobu Sugiura

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Hitoshi Murata

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Jyunichi Nishihara

Hitachi

View shared research outputs
Top Co-Authors
Avatar

Kazuo Tanaka

University of Tokyo

View shared research outputs
Top Co-Authors
Avatar

Kenji Tanaka

Hitachi

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge