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Akira Kagoshima

Hitachi

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Publication

Featured researches published by Akira Kagoshima.

Archive | 2004

Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor

Junichi Tanaka; Hiroyuki Kitsunai; Akira Kagoshima; Daisuke Shiraishi; Hideyuki Yamamoto; Shoji Ikuhara; Toshio Masuda

Archive | 2006

Disturbance-free, recipe-controlled plasma processing system and method

Akira Kagoshima; Hideyuki Yamamoto; Shoji Ikuhara; Toshio Masuda; Hiroyuki Kitsunai; Junichi Tanaka; Natsuyo Morioka; Kenji Tamaki

Archive | 2002

Etching system and etching method

Akira Kagoshima; Motohiko Yoshigai; Hideyuki Yamamoto; Daisuke Shiraishi; Junichi Tanaka; Kenji Tamaki; Natsuyo Morioka

Archive | 2001

Plasma processing apparatus for processing semiconductor wafer using plasma

Ryoji Nishio; Seiichiro Kanno; Hideyuki Yamamoto; Akira Kagoshima

Archive | 2001

Maintenance method and system for plasma processing apparatus etching and apparatus

Hideyuki Yamamoto; Toshio Masuda; Shoji Ikuhara; Akira Kagoshima; Junichi Tanaka

Archive | 2006

Method for controlling semiconductor processing apparatus

Junichi Tanaka; Hideyuki Yamamoto; Shoji Ikuhara; Akira Kagoshima

Archive | 2000

Plasma etching method, manufacturing of electronic device, plasma etching device and plasma processor

Hiromitsu Enami; Akira Kagoshima; Shigeru Masuda; Natsuyo Morioka; Daisuke Shiraishi; 茂 増田; なつよ 森岡; 弘充 榎並; 大輔 白石; 昭 鹿子嶋

Archive | 2006

Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus

Shoji Ikuhara; Hideyuki Yamamoto; Daisuke Shiraishi; Akira Kagoshima

Archive | 2003

Semiconductor plasma processing apparatus with first and second processing state monitoring units

Junichi Tanaka; Hiroyuki Kitsunai; Akira Kagoshima; Daisuke Shiraishi; Hideyuki Yamamoto; Shoji Ikuhara; Toshio Masuda

Archive | 2002

Data processing apparatus for semiconductor processing apparatus

Junichi Tanaka; Toshio Masuda; Akira Kagoshima; Shoji Ikuhara; Hideyuki Yamamoto

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Collaboration

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Daisuke Shiraishi

Hitachi

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Hideyuki Yamamoto

Hitachi

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Junichi Tanaka

Hitachi

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Shoji Ikuhara

Hitachi

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Toshio Masuda

Hitachi

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Kenji Tamaki

Hitachi

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Hiroyuki Kitsunai

Hitachi

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Natsuyo Morioka

Hitachi

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Ryoji Asakura

Hitachi

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Satomi Inoue

Hitachi

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