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Shoji Ikuhara

Hitachi

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Publication

Featured researches published by Shoji Ikuhara.

Archive | 2004

Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor

Junichi Tanaka; Hiroyuki Kitsunai; Akira Kagoshima; Daisuke Shiraishi; Hideyuki Yamamoto; Shoji Ikuhara; Toshio Masuda

Archive | 2006

Disturbance-free, recipe-controlled plasma processing system and method

Akira Kagoshima; Hideyuki Yamamoto; Shoji Ikuhara; Toshio Masuda; Hiroyuki Kitsunai; Junichi Tanaka; Natsuyo Morioka; Kenji Tamaki

Archive | 2006

Process monitoring device for sample processing apparatus and control method of sample processing apparatus

Junichi Tanaka; Hiroyuki Kitsunai; Hideyuki Yamamoto; Shoji Ikuhara; Kazue Takahashi

Archive | 2002

Operating method of vacuum processing system and vacuum processing system

Kouji Nishihata; Kazuhiro Joo; Shoji Ikuhara; Tetsuya Tahara; Shoji Okiguchi

Archive | 2001

Remote diagnostic system for facilities and remote diagnostic method

Kouji Nishihata; Kenji Nakata; Shoji Ikuhara; Hideyuki Yamamoto; Hideaki Kondo

Archive | 1987

Method of detecting an end point of plasma treatment

Shoji Ikuhara; Keiji Tada; Yoshinao Kawasaki; Katsuyoshi Kudo; Minoru Soraoka

Archive | 2001

Maintenance method and system for plasma processing apparatus etching and apparatus

Hideyuki Yamamoto; Toshio Masuda; Shoji Ikuhara; Akira Kagoshima; Junichi Tanaka

Archive | 2006

Method for controlling semiconductor processing apparatus

Junichi Tanaka; Hideyuki Yamamoto; Shoji Ikuhara; Akira Kagoshima

Archive | 2006

Etching apparatus, method for measuring self-bias voltage, and method for monitoring etching apparatus

Shoji Ikuhara; Hideyuki Yamamoto; Daisuke Shiraishi; Akira Kagoshima

Archive | 2003

Semiconductor plasma processing apparatus with first and second processing state monitoring units

Junichi Tanaka; Hiroyuki Kitsunai; Akira Kagoshima; Daisuke Shiraishi; Hideyuki Yamamoto; Shoji Ikuhara; Toshio Masuda

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Hideyuki Yamamoto

Hitachi

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Akira Kagoshima

Hitachi

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Junichi Tanaka

Hitachi

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Daisuke Shiraishi

Hitachi

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Toshio Masuda

Hitachi

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Hiroyuki Kitsunai

Hitachi

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Kazue Takahashi

Hitachi

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Kouji Nishihata

Hitachi

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Natsuyo Morioka

Hitachi

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Ken Yoshioka

Hitachi

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