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Akira Kuibira

Sumitomo Electric Industries

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Publication

Featured researches published by Akira Kuibira.

Archive | 2004

Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed

Akira Kuibira; Masuhiro Natsuhara; Hirohiko Nakata

Archive | 2000

Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus

Akira Kuibira; Hirohiko Nakata; Kenjiro Higaki; Masuhiro Natsuhara; Takashi Ishii; Yasuyuki Matsui

Archive | 2000

Wafer holder for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus using the same

Akira Kuibira; Hirohiko Nakata

Archive | 2001

Wafer holder for semiconductor manufacturing apparatus

Akira Kuibira; Hirohiko Itami Works Nakata

Archive | 2005

Semiconductor heating apparatus

Akira Kuibira; Hirohiko Nakata; Kenji Shinma

Archive | 2005

Semiconductor fabrication device heater and heating device equipped with the same

Akira Kuibira; Akira Mikumo; Masuhiro Natsuhara; Hirohiko Nakata

Archive | 2002

Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern

Masuhiro Natsuhara; Masashi Narita; Hirohiko Nakata; Akira Kuibira

Archive | 2002

Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder

Akira Kuibira; Hirohiko Nakata; Kenjiro Higaki; Masuhiro Natsuhara; Takashi Ishii; Yasuyuki Matsui

Archive | 2002

Workpiece holder for processing apparatus, and processing apparatus using the same

Masuhiro Natsuhara; Hirohiko Nakata; Akira Kuibira

Archive | 2007

HEAT TRANSFER MEMBER, CONVEX STRUCTURAL MEMBER, ELECTRONIC APPARATUS, AND ELECTRIC PRODUCT

Akira Kuibira; Masuhiro Natsuhara; Tomoyuki Awazu; Hirohiko Nakata

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Collaboration

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Hirohiko Nakata

Sumitomo Electric Industries

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Masuhiro Natsuhara

Sumitomo Electric Industries

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Kenjiro Higaki

Sumitomo Electric Industries

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Takashi Ishii

Sumitomo Electric Industries

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Yasuyuki Matsui

Sumitomo Electric Industries

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Akira Yamaguchi

Nagoya Institute of Technology

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Junichi Tatami

Yokohama National University

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Katsutoshi Komeya

Yokohama National University

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Manabu Hashikura

Sumitomo Electric Industries

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Takeshi Meguro

Yokohama National University

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