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Masuhiro Natsuhara

Sumitomo Electric Industries

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Publication

Featured researches published by Masuhiro Natsuhara.

Archive | 2006

Wafer holder for wafer prober and wafer prober equipped with same

Tomoyuki Awazu; Katsuhiro Itakura; Masuhiro Natsuhara; Hirohiko Nakata

Archive | 2001

Aluminum nitride sintered body and method of preparing the same

Yasuhisa Yushio; Hirohiko Nakata; Kazutaka Sasaki; Masuhiro Natsuhara; Motoyuki Tanaka; Yasuhiro Murase

Archive | 2006

Wafer holder, heater unit used for wafer prober having the wafer holder, and wafer prober having the heater unit

Tomoyuki Awazu; Katsuhiro Itakura; Masuhiro Natsuhara; Hirohiko Nakata

Archive | 2004

Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed

Akira Kuibira; Masuhiro Natsuhara; Hirohiko Nakata

Archive | 2000

Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus

Akira Kuibira; Hirohiko Nakata; Kenjiro Higaki; Masuhiro Natsuhara; Takashi Ishii; Yasuyuki Matsui

Archive | 2001

Fluid heating heater

Masuhiro Natsuhara; Hirohiko Nakata

Archive | 1999

Susceptor for semiconductor manufacturing equipment and process for producing the same

Yasuhisa Yushio; Hirohiko Nakata; Masuhiro Natsuhara

Archive | 1996

Heater and heating/fixing unit comprising the same

Masuhiro Natsuhara; Hirohiko Nakata

Archive | 1994

Aluminium nitride ceramics and method for preparing the same

Kouhei Shimoda; Kazuya Kamitake; Hirohiko Nakata; Kazutaka Sasaki; Masuhiro Natsuhara; Harutoshi Ukegawa

Archive | 2005

Semiconductor fabrication device heater and heating device equipped with the same

Akira Kuibira; Akira Mikumo; Masuhiro Natsuhara; Hirohiko Nakata

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Hirohiko Nakata

Sumitomo Electric Industries

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Akira Kuibira

Sumitomo Electric Industries

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Tomoyuki Awazu

Sumitomo Electric Industries

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Yasuhisa Yushio

Sumitomo Electric Industries

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Katsuhiro Itakura

Sumitomo Electric Industries

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Motoyuki Tanaka

Sumitomo Electric Industries

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Kazutaka Sasaki

Sumitomo Electric Industries

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Manabu Hashikura

Sumitomo Electric Industries

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Akira Mikumo

Sumitomo Electric Industries

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Kenji Shinma

Sumitomo Electric Industries

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