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Dive into the research topics where Hirohiko Nakata is active.

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Featured researches published by Hirohiko Nakata.


Japanese Journal of Applied Physics | 1997

Morphology and X-Ray Diffraction Peak Widths of Aluminum Nitride Single Crystals Prepared by the Sublimation Method

Motoyuki Tanaka; Seiji Nakahata; Kouichi Sogabe; Hirohiko Nakata; Masaaki Tobioka

AlN single crystal is one of the promising materials for substrates of GaN-based laser diodes. We prepared aluminum nitride single crystals by the sublimation method and characterized them. The crystals are transparent and slightly yellow. Some crystals are needle-shaped with a hexagonal cross section, diameter of 0.5 mm and length of 3 mm, grown parallel to |001|. Other crystals are plate-shaped with a maximum width of 3 mm, 5 mm length and 0.5 mm thickness, grown with a large (001) face. Also, other crystals are needle-shaped with a rectangular cross section, width of 1 mm, 7 mm length and 0.3 mm thickness, grown with a large (101) face. Their widths of X-ray rocking curves is about 39 arcsec, with a full width at half-maximum, 203 arcsec and 12 arcsec, respectively. The orientation of AlN single crystal axis is sufficient for use in substrates for GaN-based diodes.


Archive | 1998

Copper circuit junction substrate and method of producing the same

Kazutaka Sasaki; Hirohiko Nakata


Archive | 2006

Wafer holder for wafer prober and wafer prober equipped with same

Tomoyuki Awazu; Katsuhiro Itakura; Masuhiro Natsuhara; Hirohiko Nakata


Archive | 2001

Aluminum nitride sintered body and method of preparing the same

Yasuhisa Yushio; Hirohiko Nakata; Kazutaka Sasaki; Masuhiro Natsuhara; Motoyuki Tanaka; Yasuhiro Murase


Archive | 2006

Wafer holder, heater unit used for wafer prober having the wafer holder, and wafer prober having the heater unit

Tomoyuki Awazu; Katsuhiro Itakura; Masuhiro Natsuhara; Hirohiko Nakata


Archive | 2006

Wafer holder, heater unit used for wafer prober and having wafer holder, and wafer prober

Kenji Shinma; Katsuhiro Itakura; Tomoyuki Awazu; Hirohiko Nakata


Archive | 2004

Holder for use in semiconductor or liquid-crystal manufacturing device and semiconductor or liquid-crystal manufacturing device in which the holder is installed

Akira Kuibira; Masuhiro Natsuhara; Hirohiko Nakata


Archive | 1999

Power module board and power module using the board

Yoshiyuki Hirose; Kazutaka Sasaki; Mitsuru Shimazu; Hirohiko Nakata


Archive | 2000

Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus

Akira Kuibira; Hirohiko Nakata; Kenjiro Higaki; Masuhiro Natsuhara; Takashi Ishii; Yasuyuki Matsui


Archive | 2001

High thermal conductivity composite material, and method for producing the same

Chihiro Kawai; Hirohiko Nakata

Collaboration


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Masuhiro Natsuhara

Sumitomo Electric Industries

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Akira Kuibira

Sumitomo Electric Industries

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Kazutaka Sasaki

Sumitomo Electric Industries

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Tomoyuki Awazu

Sumitomo Electric Industries

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Yasuhisa Yushio

Sumitomo Electric Industries

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Katsuhiro Itakura

Sumitomo Electric Industries

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Motoyuki Tanaka

Sumitomo Electric Industries

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Kenji Shinma

Sumitomo Electric Industries

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Akira Mikumo

Sumitomo Electric Industries

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Manabu Hashikura

Sumitomo Electric Industries

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