Albert G. Baca

Effect of temperature on Ga2O3(Gd2O3)/GaN metal–oxide–semiconductor field-effect transistors

Ga2O3(Gd2O3) was deposited on GaN for use as a gate dielectric in order to fabricate a depletion metal–oxide–semiconductor field-effect transistor (MOSFET). Analysis of the effect of temperature on the device shows that gate leakage is significantly reduced at elevated temperature relative to a conventional metal–semiconductor field-effect transistor fabricated on the same GaN layer. MOSFET device operation in fact improved upon heating to 400 °C. Modeling of the effect of temperature on contact resistance suggests that the improvement is due to a reduction in the parasitic resistances present in the device.

A survey of ohmic contacts to III-V compound semiconductors

A survey of ohmic contact materials and properties to GaAs, InP, GaN will be presented along with critical issues pertaining to each semiconductor material. Au-based alloys (e.g., GeAuNi for n-type GaAs) are the most commonly used contacts for GaAs and InP materials for both n- and p-type contacts due to the excellent contact resistivity, reliability, and usefulness over a wide range of doping levels. Research into new contacting schemes for these materials has focused on addressing limitations of the conventional Au-alloys in thermal stability, propensity for spiking, poor edge definition, and new approaches for a non-alloyed contact. The alternative contacts to GaAs and InP include alloys with higher temperature stability, contacts based on solid phase regrowth, and contacts that react with the substrate to form lower bandgap semiconductors alloys at the interface. A new area of contact studies is for the wide bandgap group III-Nitride materials. At present, low resistivity ohmic contact to p-type GaN has not been obtained primarily due to the large acceptor ionization energy and the resultant difficulty in achieving high free hole concentrations at room temperature. For n-type GaN, however, significant progress has been reported with reactive Ti-based metalization schemes or the use of graded InGaN layers. The present status of these approaches will be reviewed.

Influence of MgO and Sc2O3 passivation on AlGaN/GaN high-electron-mobility transistors

Unpassivated AlGaN/GaN high-electron-mobility transistors show significant gate lag effects due to the presence of surface states in the region between the gate and drain contact. Low-temperature (100 °C) layers of MgO or Sc2O3 deposited by plasma-assisted molecular-beam epitaxy are shown to effectively mitigate the collapse in drain current through passivation of the surface traps. These dielectrics may have advantages over the more conventional SiNX passivation in terms of long-term device stability.

Ion‐implanted GaN junction field effect transistor

Selective area ion implantation doping has been used to fabricate GaN junction field effect transistors (JFETs). p‐type and n‐type doping was achieved with Ca and Si implantation, respectively, followed by a 1150 °C rapid thermal anneal. A refractory W gate contact was employed that allows the p‐gate region to be self‐aligned to the gate contact. A gate turn‐on voltage of 1.84 V at 1 mA/mm of gate current was achieved. For a ∼1.7 μm×50 μm JFET with a −6 V threshold voltage, a maximum transconductance of 7 mS/mm at VGS=− 2V and saturation current of 33 mA/mm at VGS=0 V were measured. These results were limited by excess access resistance and can be expected to be improved with optimized n+ implants in the source and drain regions.

dc and rf performance of proton-irradiated AlGaN/GaN high electron mobility transistors

AlGaN/GaN high electron mobility transistors (HEMTs) with a range of gate lengths (0.8–1.2 μm) and widths (100–200 μm) were exposed to 40 MeV protons at fluences of 5×109 or 5×1010 cm−2. The drain–source currents in the devices decreased by 15%–20% at the higher fluence, while the extrinsic transconductance decreased by ∼30% under the same conditions. Based on the increases in the reverse breakdown voltage and the channel resistance, the main degradation mechanism is believed to be creation of deep trap states in the band gap which remove electrons from the channel. The maximum frequency of oscillation, fMAX, also decreased as a result of the proton-induced damage, with a change of −20% at the shorter gate widths and −50% at the largest widths. The reverse recovery switching time was essentially unaffected by the irradiation, remaining at ∼1.6×10−8 s. Postradiation annealing at 800 °C was successful in restoring the dc and rf performance parameters to ⩾90% of their original values. The AlGaN/GaN HEMTs are...

Growth and Fabrication of GaN/AlGaN Heterojunction Bipolar Transistor

A GaN/AlGaN heterojunction bipolar transistor structure with Mg doping in the base and Si Doping in the emitter and collector regions was grown by Metal Organic Chemical Vapor Deposition in c-axis Al(2)O(3). Secondary Ion Mass Spectrometry measurements showed no increase in the O concentration (2-3x10(18) cm(-3)) in the AlGaN emitter and fairly low levels of C (~4-5x10(17) cm (-3)) throughout the structure. Due to the non-ohmic behavior of the base contact at room temperature, the current gain of large area (~90 um diameter) devices was <3. Increasing the device operating temperature led to higher ionization fractions of the mg acceptors in the base, and current gains of ~10 were obtained at 300 degree C.

Sputtered AlN encapsulant for high‐temperature annealing of GaN

Reactively sputtered AlN is shown by electrical characterization of Pt/Au Schottky diodes to be an effect encapsulant for GaN annealed at 1100 °C. Schottky diodes formed on GaN encapsulated with AlN during the anneal had low reverse leakage currents with breakdown voltages in excess of 40 V. In contrast, samples annealed without the AlN layer had 3–4 orders‐of‐magnitude higher reverse leakage currents. Atomic force microscopy images of as‐grown and annealed samples also demonstrate an increase in surface roughness and a change in morphology of the uncapped samples following annealing. Auger electron spectroscopy supports the hypothesis that the AlN encapsulant is reducing N loss from the GaN substrate. N loss in the uncapped samples is expected to create an n+‐region at the surface that accounts for the high reverse leakage current and improved Ohmic behavior for the uncapped samples. The use of AlN encapsulation will enable the realization of all ion implanted GaN metal semiconductor field effect transis...

Self-heating study of an AlGaN∕GaN-based heterostructure field-effect transistor using ultraviolet micro-Raman scattering

We report micro-Raman studies of self-heating in an AlGaN∕GaN heterostructure field-effect transistor using below (visible 488.0nm) and near (UV 363.8nm) GaN band-gap excitation. The shallow penetration depth of the UV light allows us to measure temperature rise (ΔT) in the two-dimensional electron gas (2DEG) region of the device between drain and source. Visible light gives the average ΔT in the GaN layer, and that of the SiC substrate, at the same lateral position. Combined, we depth profile the self-heating. Measured ΔT in the 2DEG is consistently over twice the average GaN-layer value. Electrical and thermal transport properties are simulated. We identify a hotspot, located at the gate edge in the 2DEG, as the prevailing factor in the self-heating.

GaN electronics for high power, high temperature applications

A brief review is given of recent progress in fabrication of high voltage GaN and AlGaN rectifiers, GaN/AlGaN heterojunction bipolar transistors and GaN metal-oxide semiconductor field effect transistors. Improvements in epitaxial layer quality and in fabrication techniques have led to significant advances in device performance.

300°C GaN/AlGaN Heterojunction Bipolar Transistor

A GaN/AlGaN heterojunction bipolar transistor has been fabricated using Cl 2 /Ar dry etching for mesa formation. As the hole concentration increases due to more efficient ionization of the Mg acceptors at elevated temperatures (> 250°C), the device shows improved gain. Future efforts should focus on methods for reducing base resistance, which are briefly summarized.