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Albert Hasper

ASM International

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international symposium on microarchitecture | 1999

Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing

Albert Hasper; Ed Oosterlaken; Frank Huussen; Tanja Claasen-Vujcic

Production of 300-mm diameter wafers will begin in the next few years. To keep costs low and throughput high, manufacturers must design new equipment such as the furnace system presented here, rather than simply upscaling existing 200-mm equipment.

Archive | 1999

Method and device for transferring wafers

Albert Hasper; Frank Huussen; Cornelis Marinus Kooijman; Theodorus Gerardus Maria Oosterlaken; Jack Herman Van Putten; Christianus Gerardus Maria De Ridder; Gert-Jan Snijders; Jeroen Stoutjesdijk; Jan Zinger

Archive | 1999

Sorting/storage device for wafers and method for handling thereof

Albert Hasper; Sebastiaan Eliza Nooten; Menso Hendriks

Archive | 2004

Resource consumption calculator

Albert Hasper

Archive | 2005

Method of processing substrates with integrated weighing steps

Albert Hasper

Archive | 1998

Device for processing semiconductor wafers

Ernst Hendrik August Granneman; Albert Hasper; Jan Zinger

Archive | 2005

Deposition of titanium nitride film within batch reactor

Radko Gerard Bankras; Blank Marinus J. De; Albert Hasper; Gert-Jan Snijders; Lieve Vandezande; ハスペル アルベルト; スネイダース ゲルト−ジャン; ジェイ． デ ブランク マリナス; ゲラード バンクラス ラドコ; バンデザンデ リーベ

Archive | 2007

In situ silicon and titanium nitride deposition

Albert Hasper

Archive | 2003

Apparatus for treating wafers, provided with a sensor box

Christianus Gerardus Maria De Ridder; Gert-Jan Snijders; Albert Hasper; Jan Zinger

Archive | 2005

Parts for deposition reactors

Albert Hasper; Theodorus Gerardus Maria Oosterlaken

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Frank Huussen

ASM International

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Gert-Jan Snijders

ASM International

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Jan Zinger

ASM International

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Theodorus Gerardus Maria Oosterlaken

ASM International

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Menso Hendriks

ASM International

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Lieve Vandezande

ASM International

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Putten Herman Van

ASM International

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Gerardus Oosterlaken

ASM International

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Jack Herman Van Putten

ASM International

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Radko Gerard Bankras

ASM International

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