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Frank Huussen

ASM International

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Publication

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international symposium on microarchitecture | 1999

Advanced manufacturing equipment: a vertical batch furnace for 300-mm wafer processing

Albert Hasper; Ed Oosterlaken; Frank Huussen; Tanja Claasen-Vujcic

Production of 300-mm diameter wafers will begin in the next few years. To keep costs low and throughput high, manufacturers must design new equipment such as the furnace system presented here, rather than simply upscaling existing 200-mm equipment.

Archive | 2004

Method and apparatus for supporting a semiconductor wafer during processing

Ernst Hendrik August Granneman; Frank Huussen

Archive | 1999

Method and device for transferring wafers

Albert Hasper; Frank Huussen; Cornelis Marinus Kooijman; Theodorus Gerardus Maria Oosterlaken; Jack Herman Van Putten; Christianus Gerardus Maria De Ridder; Gert-Jan Snijders; Jeroen Stoutjesdijk; Jan Zinger

Archive | 1997

Method and apparatus for contactless treatment of a semiconductor substrate in wafer form

Ernst Hendrik August Granneman; Frank Huussen

Archive | 2003

Hybrid cascade model-based predictive control system

Liu Zhenduo; Frank Huussen

Archive | 2003

Process tube support sleeve with circumferential channels

Christianus Gerardus Maria De Ridder; Theodorus Gerardus Maria Oosterlaken; Frank Huussen

Archive | 2000

Method for supporting a semiconductor wafer during processing

Ernst Hendrik August Granneman; Frank Huussen

Archive | 2003

Multilevel pedestal for furnace

Theodorus Gerardus Maria Oosterlaken; Frank Huussen; Timothy Robert Landsmeer; Herbert Terhorst

Archive | 2000

Apparatus for supporting a semiconductor wafer during processing

Ernst Hendrik August Granneman; Frank Huussen

Archive | 2012

Method for processing solar cell substrates

Chris G. M. de Ridder; Klaas P. Boonstra; Adriaan Garssen; Frank Huussen

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Albert Hasper

ASM International

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Theodorus Gerardus Maria Oosterlaken

ASM International

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Gert-Jan Snijders

ASM International

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Jan Zinger

ASM International

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Ernst Hendrik August Granneman

ASM International

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Jack Herman Van Putten

ASM International

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Putten Herman Van

ASM International

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Gerardus Oosterlaken

ASM International

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Christianus Gerardus Maria De Ridder

ASM International

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Cornelis Marinus Kooijman

ASM International

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