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Alex Schreiber

Applied Materials

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Publication

Featured researches published by Alex Schreiber.

Archive | 1995

CVD processing chamber

Jun Zhao; Tom K. Cho; Charles Dornfest; Stefan Wolff; Kevin Fairbairn; Xin Sheng Guo; Alex Schreiber; John M. White

Archive | 1996

Thermally floating pedestal collar in a chemical vapor deposition chamber

Jun Zhao; Ashok K. Sinha; Avi Tepman; Mei Chang; Lee Luo; Alex Schreiber; Talex Sajoto; Stefan Wolff; Charles Dornfest; Michal Danek

Archive | 1996

Faceplate thermal choke in a CVD plasma reactor

Jun Zhao; Alex Schreiber

Archive | 1999

Apparatus for substrate processing with improved throughput and yield

Jun Zhao; Ashok K. Sinha; Avi Tepman; Mei Chang; Lee Luo; Alex Schreiber; Talex Sajoto; Stefan Wolff; Charles Dornfest; Michal Danek

Archive | 1995

Method of reducing residue accumulation in CVD chamber using ceramic lining

Jun Zhao; Tom K. Cho; Xin Sheng Guo; Atsushi Tabata; Jianmin Qiao; Alex Schreiber

Archive | 1997

Removable pumping channel liners within a chemical vapor deposition chamber

Jun Zhao; Ashok K. Sinha; Avi Tepman; Mei Chang; Lee Luo; Alex Schreiber; Talex Sajoto; Stefan Wolff; Charles Dornfest; Michal Danek

Archive | 1998

Plasma treatment of titanium nitride formed by chemical vapor deposition

Jun Zhao; Ashok K. Sinha; Avi Tepman; Mei Chang; Lee Luo; Alex Schreiber; Talex Sajoto; Stefan Wolff; Charles Dornfest; Michal Danek

Archive | 2000

Gas distribution plate

Harald Herchen; David Palagashvili; Dmitry Lubomirsky; Alex Schreiber

Archive | 1996

Method for reducing residue deposition in cvd chamber using ceramic lining and its device

Tom K. Cho; Xin Shng Guo; Zhao Jun; Jianmin Qiao; Alex Schreiber; Atsushi Tabata; シュレイバー アレックス; ジュン シャオ; チャオ ジャンミン; シェン グオ シン; チョー トム; 篤 田畑

Archive | 2001

Novel thermal transfer apparatus

David Palagashvili; Alex Schreiber; Harald Herchen

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Jun Zhao

Applied Materials

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Tom K. Cho

Applied Materials

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Charles Dornfest

Applied Materials

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Stefan Wolff

Applied Materials

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Xin Sheng Guo

Applied Materials

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Atsushi Tabata

Applied Materials

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Jianmin Qiao

Applied Materials

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Ashok K. Sinha

Applied Materials

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Avi Tepman

Applied Materials

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John M. White

Applied Materials

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