Tom K. Cho | Researchain

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Featured researches published by Tom K. Cho.

Archive | 1995

CVD processing chamber

Jun Zhao; Tom K. Cho; Charles Dornfest; Stefan Wolff; Kevin Fairbairn; Xin Sheng Guo; Alex Schreiber; John M. White

Archive | 2005

Tandem uv chamber for curing dielectric materials

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad

Archive | 2000

Directing a flow of gas in a substrate processing chamber

Laxman Murugesh; Padmanaban Krishnaraj; Michael S. Cox; Canfeng Lai; Narendra Dubey; Tom K. Cho; Sudhir Gondhalekar; Lily L. Pang

Archive | 1995

Method of reducing residue accumulation in CVD chamber using ceramic lining

Jun Zhao; Tom K. Cho; Xin Sheng Guo; Atsushi Tabata; Jianmin Qiao; Alex Schreiber

Archive | 2007

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho

Archive | 2006

High efficiency UV curing system

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad

Archive | 2009