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Dive into the research topics where Tom K. Cho is active.

Publication


Featured researches published by Tom K. Cho.


Archive | 1995

CVD processing chamber

Jun Zhao; Tom K. Cho; Charles Dornfest; Stefan Wolff; Kevin Fairbairn; Xin Sheng Guo; Alex Schreiber; John M. White


Archive | 2005

Tandem uv chamber for curing dielectric materials

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad


Archive | 2000

Directing a flow of gas in a substrate processing chamber

Laxman Murugesh; Padmanaban Krishnaraj; Michael S. Cox; Canfeng Lai; Narendra Dubey; Tom K. Cho; Sudhir Gondhalekar; Lily L. Pang


Archive | 1995

Method of reducing residue accumulation in CVD chamber using ceramic lining

Jun Zhao; Tom K. Cho; Xin Sheng Guo; Atsushi Tabata; Jianmin Qiao; Alex Schreiber


Archive | 2007

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho


Archive | 2006

High efficiency UV curing system

Thomas Nowak; Juan Carlos Rocha-Alvarez; Andrzej Kaszuba; Scott A. Hendrickson; Dustin W. Ho; Sanjeev Baluja; Tom K. Cho; Josephine J. Chang; Hichem M'Saad


Archive | 2009

Gas distribution blocker apparatus

Lun Tsuei; Alan Tso; Tom K. Cho; Brian Sy-Yuan Shieh


Archive | 2007

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

Juan Carlos Rocha-Alvarez; Thomas Nowak; Dale R. Du Bois; Sanjeev Baluja; Scott A. Hendrickson; Dustin W. Ho; Andrzei Kaszuba; Tom K. Cho


Archive | 1994

Exhaust baffle for uniform gas flow pattern

Tom K. Cho; Christopher S. Ngai


Archive | 2010

Systems, apparatus and methods for moving substrates

Prudhvi R. Chintalapati; Satish Sundar; Boris Axelrod; Mario Dave Silvetti; Tom K. Cho; Jeffrey A. Brodine; Jason K. Foster; Edward Ng

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