Alexander Belyaev
KLA-Tencor
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Publication
Featured researches published by Alexander Belyaev.
advanced semiconductor manufacturing conference | 2012
Roland Brun; Cécile Moulin; Walter Schwarzenbach; Gerhard Bast; Victor Aristov; Alexander Belyaev
This paper will explain the challenges and solutions for ultra thin SOI inspection using a laser light scattering based system. The impact of reflectivity on haze, sizing and minimum threshold will be detailed. We will show how the required sensitivity for 28nm (and beyond node) SOI inspection was achieved using a commercially available unpatterned DUV inspection system. We will also study improvements in defect classification.
Archive | 2007
Guoheng Zhao; Alexander Belyaev; Christian Wolters; Paul Doyle; Howard W. Dando; Mehdi Vaez-Iravani
Archive | 2007
David Chen; Andrew Steinbach; Daniel Kavaldjiev; Alexander Belyaev; Juergen Reich
Archive | 2005
David W. Shortt; Stephen Biellak; Alexander Belyaev
Archive | 2006
Alexander Belyaev; Daniel Kavaldjiev; Amith Murali; Aleksey Petrenko; Mike Kirk; David W. Shortt; Brian L. Haas; Kurt L. Haller
Archive | 2007
Alexander Belyaev; Brian L. Haas; Kurt L. Haller; Daniel Kavaldjiev; Mike Kirk; Amith Murali; Aleksey Petrenko; David W. Shortt; ベリアエブ アレクサンダー; ペトレンコ アレクセイ; ムラリ エイミス; エル ハラー カート; カバルジェブ ダニエル; ショート デビット; エル ハース ブリアン; ディー キーク マイク
Archive | 2012
George Kren; Paul Doyle; Alexander Belyaev
Archive | 2011
Paul Doyle; Guoheng Zhao; Alexander Belyaev; J. Rex Runyon; Christian Wolters; Howard W. Dando; Mehdi Vaez-Iravani
Archive | 2011
Paul Doyle; Alexander Belyaev
Archive | 2009
Paul Doyle; Guoheng Zhao; Alexander Belyaev; J. Rex Runyon
