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Guoheng Zhao

KLA-Tencor

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Publication

Featured researches published by Guoheng Zhao.

Archive | 2003

Optical system for measuring samples using short wavelength radiation

Mehrdad Nikoonahad; Shing Lee; Hidong Kwak; Sergio Edelstein; Guoheng Zhao; Gary R. Janik

Archive | 2003

Systems and methods for inspection of specimen surfaces

Mehrdad Nikoonahad; Guoheng Zhao; Kalman Kele

Archive | 2000

In-situ metalization monitoring using eddy current and optical measurements

Kurt Lehman; Shing M. Lee; Walter H. Johnson; Guoheng Zhao; Mehrdad Nikoonahad

Archive | 2005

Overlay error detection

Mehrdad Nikoonahad; Guoheng Zhao; Andrei V. Shchegrov; Ben Tsai

Archive | 2009

System for scatterometric measurements and applications

Anatoly Fabrikant; Guoheng Zhao; Daniel Wack; Mehrdad Nikoonahad

Archive | 1999

Apparatus and methods for performing self-clearing optical measurements

Mehrdad Nikoonahad; Shing M. Lee; Kalman Kele; Guoheng Zhao; Kurt Lehman

Archive | 2001

Improved system for scatterometric measurements and applications

Anatoly Fabrikant; Guoheng Zhao; Daniel Wack; Mehrdad Nikoonahad

Archive | 2000

In-situ metalization monitoring using eddy current measurements and optical measurements

Kurt Lehman; Shing M. Lee; Walt Johnson; Guoheng Zhao; Mehrdad Nikoonahad

Archive | 2002

System for MEMS inspection and characterization

Mehrdad Nikoonahad; Guoheng Zhao

Archive | 2000

Apparatus and methods for detecting killer particles during chemical mechanical polishing

Mehrdad Nikoonahad; Anantha Sethuraman; Guoheng Zhao

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Collaboration

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Mehrdad Nikoonahad

KLA-Tencor

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Kurt Lehman

KLA-Tencor

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Daniel Wack

KLA-Tencor

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Kalman Kele

KLA-Tencor

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Shing Lee

KLA-Tencor

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Shing M. Lee

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Anatoly Fabrikant

KLA-Tencor

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Noah Bareket

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Rodney Smedt

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Anantha Sethuraman

KLA-Tencor

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