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Dive into the research topics where Daniel Kavaldjiev is active.

Publication


Featured researches published by Daniel Kavaldjiev.


Archive | 2007

Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool

David Chen; Andrew Steinbach; Daniel Kavaldjiev; Alexander Belyaev; Juergen Reich


Archive | 2005

Reduced coherence symmetric grazing incidence differential interferometer

Dieter Mueller; Rainer Schierle; Daniel Kavaldjiev


Journal of the Acoustical Society of America | 2010

Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Paul J Sullivan; George Kren; Rodney Smedt; Hans Hansen; David W. Shortt; Daniel Kavaldjiev; Christopher F. Bevis


Archive | 2008

SYSTEMS AND METHODS FOR DETERMINING TWO OR MORE CHARACTERISTICS OF A WAFER

Stephen Biellak; Daniel Kavaldjiev


Archive | 2010

Photomultiplier tube optimized for surface inspection in the ultraviolet

Stephen Biellak; Daniel Kavaldjiev; Stuart Friedman


Archive | 2009

Method and apparatus for measuring shape or thickness information of a substrate

Shouhong Tang; George Kren; Dieter Mueller; Brian L. Haas; Daniel Kavaldjiev


Archive | 2008

Computer-implemented methods for inspecting and/or classifying a wafer

Juergen Reich; Louis Vintro; Prasanna Dighe; Andrew Steinbach; Daniel Kavaldjiev; Stephen Biellak


Archive | 2006

Computer-implemented methods and systems for determining a configuration for a light scattering inspection system

Alexander Belyaev; Daniel Kavaldjiev; Amith Murali; Aleksey Petrenko; Mike Kirk; David W. Shortt; Brian L. Haas; Kurt L. Haller


Archive | 2009

Computer-implemented methods, computer-readable media, and systems for determining one or more characteristics of a wafer

Haiguang Chen; Daniel Kavaldjiev; Louis Vintro; George Kren


Archive | 2013

Sample Inspection System Detector

Daniel Kavaldjiev; Stephen Biellak; Guoheng Zhao; Mehdi Vaez-Iravani

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