Alexander Tam | Researchain

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Featured researches published by Alexander Tam.

Archive | 2007

Multi-gas straight channel showerhead

Brian H. Burrows; Alexander Tam; Ronald Stevens; Kenric Choi; James David Felsch; Jacob Grayson; Sumedh Acharya; Sandeep Nijhawan; Lori D. Washington; Nyi O. Myo

Archive | 2007

Multi-gas concentric injection showerhead

Alexander Tam; Ronald Stevens; Jacob Grayson; David Bour; Sandeep Nijhawan

Archive | 2005

Apparatus and method for the deposition of silicon nitride films

Jacob Smith; Sean M. Seutter; R. Iyer; Binh Tran; Alexander Tam; James Wilson

Archive | 2012

Pedestal with multi-zone temperature control and multiple purge capabilities

Jang-Gyoo Yang; Alexander Tam; Elisha Tam

Archive | 2004

Thermal chemical vapor deposition of silicon nitride using BTBAS bis(tertiary-butylamino silane) in a single wafer chamber

R. Iyer; Sean M. Seutter; Jacob Smith; Gregory W. Dibello; Alexander Tam; Binh Tran; Sanjeev Tandon

Archive | 2008

Processing system for fabricating compound nitride semiconductor devices

Brian H. Burrows; Lori D. Washington; Ronald Stevens; Kenric Choi; Anthony F. White; Roger N. Anderson; Sandeep Nijhawan; Joshua J. Podesta; Alexander Tam

Archive | 2007

MULTI-GAS SPIRAL CHANNEL SHOWERHEAD

Alexander Tam; Jacob Grayson; Sumedh Acharya

Archive | 2006

System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus

David Bour; Lori D. Washington; Sandeep Nijhawan; Ronald Stevens; Jacob Smith; Alexander Tam; Nyi O. Myo; Steve Park; Rosemary Twist; Garry Kwong; Jie Su

Archive | 2010