David H. Quach | Researchain

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Featured researches published by David H. Quach.

Archive | 2008

Cluster tool architecture for processing a substrate

Tetsuya Ishikawa; Rick J. Roberts; Helen R. Armer; Leon Volfovski; Jay D. Pinson; Michael R. Rice; David H. Quach; Mohsen Salek; Robert B. Lowrance; John A. Backer; William T. Weaver; Charles Carlson; Chongyang Wang; Jeffrey C. Hudgens; Harald Herchen; Brian Lue

Archive | 2003

Process and an integrated tool for low k dielectric deposition including a pecvd capping module

Jun Zhao; Farhad Moghadam; Tim Weidman; Rick J. Roberts; Hari Ponnekanti; Chau T. Nguyen; Satish Sundar; David H. Quach; Sasson Somekh

Archive | 2005

High productivity plasma processing chamber

Mario David Silvetti; David H. Quach; Bok Hoen Kim; Thomas Nowak; Thomas K. Cho; Fred H. Hariz; Robert B. Moore

Archive | 2010

Cluster tool for leds

Sandeep Nijhawan; Brian H. Burrows; Tetsuya Ishikawa; Olga Kryliouk; Anand Vasudev; Jie Su; David H. Quach; Anzhong Chang; Yuriy Melnik; Harsukhdeep S. Ratia; Son T. Nguyen; Lily L. Pang

Archive | 2007

Integrated thermal unit having a shuttle with a temperature controlled surface

David H. Quach; Martin Jeff Salinas

Archive | 2006

Apparatus and method for heating substrates

Jun Zhao; David H. Quach; Timothy W. Weidman; Rick J. Roberts; Farhad Moghadam; Dan Maydan

Archive | 2007

Integrated thermal unit having a shuttle with two-axis movement

David H. Quach; Martin Jeff Salinas

Archive | 2005

Bake plate having engageable thermal mass

David H. Quach; Tetsuya Ishikawa

Archive | 2004

Electron beam treatment apparatus

David H. Quach; Jun Zhao

Archive | 2011

METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CHAMBER CLEANING GAS

Hua Chung; Xizi Dong; Kyawwin Jason Maung; Hiroji Hanawa; Sang Won Kang; David H. Quach; Donald J. K. Olgado; David Bour; Wei-Yung Hsu; Alexander Tam; Anzhong Chang; Sumedh Acharya

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