Anzhong Chang | Researchain

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Featured researches published by Anzhong Chang.

Archive | 2001

Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films

Anh N. Nguyen; Michael Yang; Ming Xi; Hua Chung; Anzhong Chang; Xiaoxiong Yuan; Siqing Lu

Archive | 2000

Head for vaporizing and flowing various precursor materials onto semiconductor wafers during chemical vapor deposition

Vincent Ku; Ming Xi; Xiaoxiong Yuan; Anzhong Chang; Anh N. Nguyen

Archive | 2001

Ceramic substrate support body

Anzhong Chang; Chun-Rai Ray Lawrence; Anh N. Nguyen; Ron Rose; Hongbee Teoh; Sal Umotoy; Xiaoxiong Yuan; エヌングイェンアン; チャンアンゾーン; ウモトイサル; ユアンシアオシオン; テオーホンビー; チュン−ライレイローレンス; ローズロン

Archive | 2014

Epi base ring

Steve Aboagye; Paul Brillhart; Surajit Kumar; Anzhong Chang; Satheesh Kuppurao; Mehmet Tugrul Samir; David K. Carlson

Archive | 2013

QUARTZ UPPER AND LOWER DOMES

Anzhong Chang; Paul Brillhart; Mehmet Tugrul Samir; Anh N. Nguyen; Kailash Kiran Patalay; Surajit Kumar; Steve Aboagye; David K. Carlson; Satheesh Kuppurao; Joseph M. Ranish; Oleg V. Serebryanov; Dongming Iu; Shu-Kwan Lau; Zouming Zhu; Herman Diniz

Archive | 2015

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK

Schubert S. Chu; Anhthu Ngo; Karthik Ramanathan; Nitin Pathak; Nyi O. Myo; Paul Brillhart; Richard O. Collins; Kevin Joseph Bautista; Edric Tong; Zhepeng Cong; Anzhong Chang; Kin Pong Lo; Manish Hemkar

Archive | 2001

Substrate support for a semiconductor processing chamber

Anzhong Chang; Lei Lawrence Chung-Lai; Anh N. Nguyen; Ron Rose; Hongbee Teoh; Sal Umotoy; Xiaoxiong Yuan

Archive | 2014

Light pipe window structure for thermal chamber applications and processes

Joseph M. Ranish; Aaron Muir Hunter; Anzhong Chang

Archive | 2016

Recursive pumping member

Paul Brillhart; Edric Tong; Anzhong Chang; David K. Carlson; Errol Antonio C. Sanchez; James Francis Mack; Kin Pong Lo; Zhiyuan Ye

Archive | 2015

Upper dome with injection assembly

Paul Brillhart; Anzhong Chang; Edric Tong; Kin Pong Lo; James Francis Mack; Zhiyuan Ye; Errol Antonio C. Sanchez; David K. Carlson; Satheesh Kuppurao; Joseph M. Ranish

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