Alisa Stratulat

Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40)

The current paper reports on a sonochemical synthesis method for manufacturing nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8 (Sono-STFO40) powder. This powder is characterized using X ray-diffraction (XRD), Mössbauer spectroscopy and Scanning Electron Microscopy (SEM), and results are compared with commercially available SrTi0.4Fe0.6O2.8 (STFO60) powder. In order to manufacture resistive oxygen sensors, both Sono-STFO40 and STFO60 are deposited, by dip-pen nanolithography (DPN) method, on an SOI (Silicon-on-Insulator) micro-hotplate, employing a tungsten heater embedded within a dielectric membrane. Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C. The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s). These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments.

Novel materials for oxygen sensing technologies

The paper reviews the state-of-the-art in oxygen sensing, focusing on low power technologies suitable for portable applications. Employment of novel materials in electrochemical, optical, acoustic and resistive oxygen sensing structures, substantiated by extensive theoretical considerations and experimental data, is discussed. Merits and drawbacks of each technology are presented, together with possible means of optimization.

CMOS-compatible SOI micro-hotplate-based oxygen sensor

The paper reports upon the design and characterization of a resistive O2 sensor, which is fully CMOS-compatible and is based on an ultra-low-power Silicon on Insulator (SOI) micro-hotplate membrane. The microsensor employs SrTi0.4Fe0.6O2.8 (STFO60) as sensing layer. Thermo-Gravimetric Analysis (TGA) Energy-Dispersive X-ray Spectroscopy (EDX), X-ray Diffraction (XRD) and Scanning Electron Microscope (SEM) techniques have been used to assess the quality of both the sensing layer and STFO-SOI interface. At room temperature, the SOI sensor shows good sensitivity and fast response time (≤ 6 seconds) to O2 concentration ranging from 0% to 20% in a nitrogen atmosphere. This is the first experimental result showing the potential of this structure as O2 sensor.

Materials selection for gas sensing. An HSAB perspective

This paper introduces the Hard Soft Acid Base (HSAB) concept as a promising tool for the selection of gas sensing layers. Target gas molecule - sensitive layer tandems are discussed and interpreted in the terms of this theory. Sensing layers suitable for carbon dioxide, nitrogen dioxide, sulphur dioxide, and hydrogen sulphide detection are presented and classified according to this concept. For oxygen and mineral acids detection, an indirect HSAB approach is discussed. The paper explains how the HSAB principle can be useful in designing gas sensing layers for different types of sensing structures, such as: surface acoustic waves (SAW), colorimetric, chemoresistive, etc.