Alton H. Phillips | Researchain

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Publication

Featured researches published by Alton H. Phillips.

Archive | 2008

DEVICES AND METHODS FOR DECREASING RESIDUAL CHUCKING FORCES

Douglas C. Watson; Christopher S. Margeson; Alton H. Phillips; Hiromitsu Yoshimoto; Noriya Kato

Archive | 2006

Liquid cooled mirror for use in extreme ultraviolet lithography

Alton H. Phillips; Derek Coon; Douglas C. Watson

Archive | 2006

Cooled optical filters and optical systems comprising same

Douglas C. Watson; Alton H. Phillips; Michael R. Sogard

Archive | 2008

EUV Reticle Handling System and Method

Alton H. Phillips; Michael R. Sogard; Douglas C. Watson

Archive | 2007

Reflective optical elements exhibiting multimetallic-like self-correction of distortions caused by heating

Alton H. Phillips; Douglas C. Watson

Archive | 2005

Lithographic-optical systems including isolatable vacuum chambers, and lithography apparatus comprising same

Alton H. Phillips; Douglas C. Watson; Hiroyuki Kondo

Archive | 2006

Utilities transfer system in a lithography system

Alton H. Phillips

Archive | 2005

Lithographic optical systems including exchangeable optical-element sets

Alton H. Phillips; Douglas C. Watson

Archive | 2003

Reversed, double-helical bellows seal

Alton H. Phillips; Hiroshi Sugimoto

Archive | 2002

Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same

Alton H. Phillips; Hideaki Sakamoto; Michael B. Binnard

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Collaboration

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Douglas C. Watson

Nikon

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Hiromitsu Yoshimoto

Nikon

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Michael B. Binnard

Nikon

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Michael R. Sogard

Nikon

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Scott Coakley

Nikon

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Yusaku Uehara

Nikon

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Douglas C. Watson

Nikon

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Hiroyuki Kondo

Nikon

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Leonard Wai Fung Kho

Nikon

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Mark Williams

Nikon

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