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Scott Coakley

Nikon

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Publication

Featured researches published by Scott Coakley.

Archive | 2007

Identifying and compensating force-ripple and side-forces produced by linear actuators

Michael B. Binnard; Scott Coakley

Archive | 2006

Hexapod kinematic mountings for optical elements, and optical systems comprising same

Yi-Ping Hsin; Hideyuki Hashimoto; Jin Nishikawa; Scott Coakley; Kunitomo Fukai; Wen-Hou Ma; Bausan Yuan

Archive | 2011

MICROCHANNEL-COOLED COILS OF ELECTROMAGNETIC ACTUATORS EXHIBITING REDUCED EDDY-CURRENT DRAG

Michael B. Binnard; Scott Coakley; Alex Ka Tim Poon; Masahiro Totsu; Derek Coon; Leonard Wai Fung Kho; Gaurav Keswani; Alexander Cooper; Michel Pharand; Matt Bjork

Archive | 2009

SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS

Alexander Cooper; Scott Coakley; Douglas C. Watson; Alton H. Phillips; Gaurav Keswani; Michael B. Binnard

Archive | 2009

Compensating Temperature Effects in Magnetic Actuators

Scott Coakley; Michael B. Binnard

Archive | 2007

On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage

Pai-Hsueh Yang; Bausan Yuan; Kazuo Masaki; Kazuhiro Hirano; Xiao-Feng Yang; Scott Coakley; Michael B. Binnard

Archive | 2008

KINEMATIC CHUCKS FOR RETICLES AND OTHER PLANAR BODIES

Scott Coakley; Thomas W. Novak; Douglas C. Watson; Alton H. Phillips

Archive | 2008

THREE DEGREE OF MOVEMENT MOVER AND METHOD FOR CONTROLLING A THREE DEGREE OF MOVEMENT MOVER

Masahiro Totsu; Michael B. Binnard; Scott Coakley

Archive | 2007

Lithography apparatus with flexibly supported optical system

Michael B. Binnard; Douglas C. Watson; Alton H. Phillips; Scott Coakley

Archive | 2012

HYBRID COOLING AND THERMAL SHIELD FOR ELECTROMAGNETIC ACTUATORS

Michael B. Binnard; Scott Coakley

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Collaboration

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Michael B. Binnard

Nikon

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Pai-Hsueh Yang

Nikon

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Alexander Cooper

Nikon

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Alton H. Phillips

Philips

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Bausan Yuan

Nikon

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Douglas C. Watson

Philips

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Masahiro Totsu

Nikon

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Gaurav Keswani

Nikon

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Kazuhiro Hirano

Nikon

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Alex Ka Tim Poon

Nikon

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