Is this you? Create Your Porfile
Avatar

Michael B. Binnard

Nikon

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Michael B. Binnard is active.

Explore More

Publication

Featured researches published by Michael B. Binnard.

Archive | 2000

Planar motor with linear coil arrays

Michael B. Binnard

Archive | 2013

Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine

Michael B. Binnard

Archive | 2002

Stage device, exposure apparatus and method

Keiichi Tanaka; Michael B. Binnard; Robert Martinek; Daniel Martinek; Andrew J. Hazelton

Archive | 1998

Electric motors and positioning devices having moving magnet arrays and six degrees of freedom

Andrew J. Hazelton; Michael B. Binnard; Jean-Marc Gery

Archive | 2001

Wafer stage with magnetic bearings

Michael B. Binnard; Kazuya Ono; Andrew J. Hazelton

Archive | 2001

Apparatus and methods for detecting tool-induced shift in microlithography apparatus

Michael B. Binnard

Archive | 2001

System and method to control planar motors

Michael B. Binnard

Archive | 2008

High efficiency voice coil motor

Michael B. Binnard; Jean-Marc Gery; Andrew J. Hazelton

Archive | 2000

Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems

Toshio Ueta; Michael B. Binnard

Archive | 2013

LASER RADAR TRACKING SYSTEMS

Alexander Cooper; Michael B. Binnard

Explore More

Collaboration

Dive into the Michael B. Binnard's collaboration.

Top Co-Authors
Avatar

Scott Coakley

Nikon

View shared research outputs
Top Co-Authors
Avatar

Douglas C. Watson

Nikon

View shared research outputs
Top Co-Authors
Avatar

Andrew J. Hazelton

Nikon

View shared research outputs
Top Co-Authors
Avatar

Pai-Hsueh Yang

Nikon

View shared research outputs
Top Co-Authors
Avatar

Yoichi Arai

Nikon

View shared research outputs
Top Co-Authors
Avatar

Masahiro Totsu

Nikon

View shared research outputs
Top Co-Authors
Avatar

Bausan Yuan

Nikon

View shared research outputs
Top Co-Authors
Avatar

Chetan Mahadeswaraswamy

Nikon

View shared research outputs
Top Co-Authors
Avatar

Douglas C. Watson

Nikon

View shared research outputs
Top Co-Authors
Avatar

Alexander Cooper

Nikon

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge