Michael B. Binnard

Planar motor with linear coil arrays

Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine

Stage device, exposure apparatus and method

Electric motors and positioning devices having moving magnet arrays and six degrees of freedom

Wafer stage with magnetic bearings

Apparatus and methods for detecting tool-induced shift in microlithography apparatus

System and method to control planar motors

High efficiency voice coil motor

Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems

LASER RADAR TRACKING SYSTEMS