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Dive into the research topics where Andreas Kloeppel is active.

Publication


Featured researches published by Andreas Kloeppel.


Archive | 2002

Electric supply unit and method for reducing arcing during sputtering

Andreas Kloeppel; Christoph Daube; Johannes Stollenwerk; Thomas Linz


Archive | 2008

Double-coating device with one process chamber

Andreas Kloeppel


Archive | 2007

Sputter coating device and coating method

Ralph Lindenberg; Marcus Bender; Tobias Stolley; Andreas Kloeppel; Andreas Lopp; Christoph Moelle


SID Symposium Digest of Technical Papers | 2013

46.5L: Late‐News Paper: Large Area Sputtered Al2O3 Films for High Mobility AM‐TFT Backplanes on PVD Array System PiVot 55kVi2

Andreas Kloeppel; Jian Liu; Evelyn Scheer


Archive | 2006

EVAPORATION APPARATUS FOR COATING SUBSTRATE

Marcus Bender; Ulrich Englert; Stefan Hein; Uwe Hoffmann; Stefan Keller; Guenter Klemm; Andreas Kloeppel; Hans-Georg Lotz; アンドレアス・クレッペル; ウーヴェ・ホフマン; ウルリヒ・エングレルト; ギュンター・クレム; シュテファン・ケラー; シュテファン・ハイン; ハンス−ゲオルク・ローツ; マルクス・ベンダー


Archive | 2012

APPARATUS FOR COATING A LAYER OF SPUTTERED MATERIAL ON A SUBSTRATE AND DEPOSITION SYSTEM

Andreas Kloeppel; Markus Hanika; Evelyn Scheer; Konrad Schwanitz; Fabio Pieralisi; Jian Liu


Archive | 2000

Elektrische versorgungseinheit und verfahren zur reduktion der funkenbildung beim sputtern

Andreas Kloeppel; Christoph Daube; Johannes Stollenwerk; Thomas Linz


Archive | 2000

Electric supply unit and a method for reducing sparking during sputtering

Andreas Kloeppel; Christoph Daube; Johannes Stollenwerk; Thomas Linz


SID Symposium Digest of Technical Papers | 2017

76-1: Invited Paper: Optimization of Applied Materials PiVotTM Array Coater for Metal Oxide Semiconductor Layers

Hyun Chan Park; Andreas Kloeppel; Ajay Sampath Bhoolokam; Markus Hanika; Marcus Bender; John Douglas Busch; Hao-Chien Hsu; Dong Kil Yim


Archive | 2012

COATING APPARATUS AND METHOD

Erkan Koparal; Andreas Kloeppel

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