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Mark Hollatz

Infineon Technologies

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Publication

Featured researches published by Mark Hollatz.

Archive | 2002

Semiconductor substrate holder for chemical-mechanical polishing containing a movable plate

Mark Hollatz; Peter Lahnor

Chemical Engineering & Technology | 2003

Characterization of Slurries Used for Chemical‐Mechanical Polishing (CMP) in the Semiconductor Industry

Timo Kuntzsch; Ulrike Witnik; Mark Hollatz; Michael Stintz; Siegfried Ripperger

Archive | 2002

Making alignment mark in opaque layer on substrate, forms trenches of differing depth, fills selectively, then adds and polishes further layers to leave defined opaque mark

Mark Hollatz; Hans-Peter Moll; Kerstin Mothes

Archive | 2002

Process for the abrasive machining of surfaces, in particular of semiconductor wafers

Mark Hollatz; Andreas Römer

Archive | 2002

Process and device for the abrasive machining of surfaces, in particular semiconductor wafers

Mark Hollatz; Andreas Roemer

Archive | 2004

Method for fabricating a trench isolation structure

Kerstin Mothes; Andreas Klipp; Florian Schmitt; Mark Hollatz

Chemie Ingenieur Technik | 2002

Charakterisierung von Nanopartikeln in CMP-Slurries der Halbleiterindustrie

Timo Kuntzsch; Mark Hollatz; Michael Stintz; Siegfried Ripperger

Archive | 2005

Plane spin-on-layer production for use on semiconductor wafer, involves superimposing liner layer on semiconductor structure before superimposition of spin-on-layer, where structure supports planar superimposition of layer on it

Albert Birner; Arabinda Das; Henry Heidemeyer; Mark Hollatz; Andreas Klipp; Hans-Peter Sperlich; Uwe Wellhausen

Archive | 2005

Verfahren zum Herstellen einer ebenen Spin-on-Schicht auf einer Halbleiterstruktur A method of manufacturing a planar spin-on layer on a semiconductor structure

Albert Birner; Arabinda Das; Henry Heidemeyer; Mark Hollatz; Andreas Klipp; Hans-Peter Sperlich; Uwe Wellhausen

Archive | 2005

A method of manufacturing a planar spin-on layer on a semiconductor structure

Albert Birner; Arabinda Das; Henry Heidemeyer; Mark Hollatz; Andreas Klipp; Hans-Peter Sperlich; Uwe Wellhausen

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Collaboration

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Andreas Klipp

Infineon Technologies

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Andreas Römer

Infineon Technologies

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Kerstin Mothes

Infineon Technologies

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Andreas Roemer

Infineon Technologies

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Peter Lahnor

Infineon Technologies

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Albert Birner

Infineon Technologies

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Arabinda Das

Qimonda

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Florian Schmitt

Infineon Technologies

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Hans-Peter Sperlich

Qimonda

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Henry Heidemeyer

Infineon Technologies

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