Andreas Scheurle
Bosch
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Publication
Featured researches published by Andreas Scheurle.
international conference on micro electro mechanical systems | 2007
Andreas Scheurle; Tino Fuchs; Kersten Kehr; Christina Leinenbach; S. Kronmuller; A. Arias; J. Ceballos; M. A. Lagos; J.M. Mora; J. M. Munoz; A. Ragel; J. Ramos; S. Van Aerde; J. Spengler; A. Mehta; Agnes Verbist; B. Du Bois; Ann Witvrouw
This paper describes a monolithically integrated omegaz-gyroscope fabricated in a surface-micromaching technology. As functional structure, a 10 mum thick Silicon-Germanium layer is processed above a standard high voltage 0.35 mum CMOS-ASIC. Drive and Sense of the in plane double wing gyroscope is fully capacitively. Measurement of movement is also done fully capacitively in continuous-time baseband sensing. For characterization, the gyroscope chip is mounted on a breadboard with auxiliary circuits. A noise floor of 0.01 degs/sqrt(Hz) for operation at 3 mBar is achieved.
Archive | 2008
Frank Reichenbach; Franz Laermer; Silvia Kronmueller; Andreas Scheurle
Archive | 2008
Andreas Scheurle
international conference on micro electro mechanical systems | 2017
Johannes Classen; Jochen Reinmuth; Arnd Kälberer; Andreas Scheurle; Sebastian Gunther; Stefan Kiesel; Bernt Schellin; Jorg Brauer; Laura Eicher
Archive | 2009
Andreas Scheurle
Archive | 2008
Frank Reichenbach; Franz Laermer; Silvia Kronmueller; Andreas Scheurle
Archive | 2010
Andreas Scheurle
Archive | 2015
Andreas Scheurle; Guenther-Nino-Carlo Ullrich; Markus Heitz; Andrea Ortó
Archive | 2015
Guenther-Nino-Carlo Ullrich; Andreas Scheurle
Archive | 2014
Markus Heitz; Guenther-Nino-Carlo Ullrich; Andreas Scheurle; Andrea Ortó
